Rotary Feedthrough Layout for Compact Vacuum Robot Height
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Solution Overview
Problem
There is a demand for downsizing rotary feedthroughs and robots used in manufacturing processes, particularly in the production of flat panel displays and semiconductor devices, to reduce the overall height and maintain a low building height.
Innovation Solution
A rotary feedthrough configuration that includes a partition wall, a rotating member to transmit rotational driving force, a rotation input unit in the first space, and a rotation restraining unit in the second space, which restrains rotation exceeding a predetermined angle, allowing for reduced dimensions in both the axial and radial directions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a rotary feedthrough is used to transmit rotational driving force through a partition wall in a vacuum chamber, then the rotational driving force can be transmitted from outside to inside the vacuum chamber, but the overall height of the apparatus increases
Solution Approach 1:
Instead of placing the rotation restraining unit on the atmospheric side (outside the vacuum chamber) as in conventional designs, this patent inverts the arrangement by placing it on the vacuum side (inside the vacuum chamber). This allows the rotation input unit to be positioned closer to the partition wall, thereby reducing the overall height of the apparatus while maintaining the rotational driving force transmission function.
2Length of stationary object
If the rotary feedthrough is downsized in the axial direction to reduce overall height, then the apparatus can be housed in low-ceilinged buildings, but the rotation restraining mechanism becomes more difficult to design
Solution Approach 1:
The rotation restraining unit is integrated with the rotating member and partition wall structure. The restraining portion is provided on the rotating member itself, and the fixed portion is fixed to the partition wall, creating a compact combined structure that achieves rotation restriction without adding significant height or complexity to the overall design.
3Area of stationary object
If the rotary feedthrough is downsized in the radial direction, then the apparatus footprint is reduced, but the rotation restraining unit may interfere with the rotation input unit
Solution Approach 1:
The rotation restraining unit is designed with localized functionality where the restraining portion is positioned at a specific location on the rotating member and the fixed portion is positioned at a corresponding location on the partition wall. This localized arrangement allows the rotation restraining mechanism to function effectively without interfering with the rotation input unit, enabling compact radial dimensions while maintaining proper component spacing and function.
Data Source
AI summary
A rotary feedthrough according to the disclosure includes: a seal partition wall dividing a space into a first space and a second space; a rotating member positioned to extend through the seal partition wall and configured to transmit a rotational driving force; a rotation input unit positioned in the first space and configured to input a driving force to the rotating member; and a rotation restraining unit positioned in the second space and configured to restrain rotation of the rotating member. The rotation restraining unit restrains rotation of the rotating member about a rotation axis exceeding a predetermined rotation angle.