Rotary Flow Path Switching Apparatus for Semiconductor Exhaust Control
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Solution Overview
Problem
In semiconductor manufacturing, the existing liquid processing systems require a large number of valves and driving mechanisms for exclusive exhaust paths, leading to increased control time and space occupancy as the number of chemical liquids increases.
Innovation Solution
A flow path switching apparatus with a rotary tube and outer tube configuration, where the rotary tube is rotated to sequentially align with connection holes, allowing only one set to communicate at a time, reducing the need for multiple driving mechanisms and valves.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If exclusive exhaust paths with valves are provided for each chemical liquid, then the exhaust control for each processing unit is improved, but the number of valves and driving mechanisms increases
Solution Approach 1:
Multiple exclusive exhaust paths for different chemical liquids are merged into a single common exhaust path. The flow path switching unit consolidates what would otherwise require multiple separate exhaust lines and valves into one shared exhaust system, reducing the number of valves while maintaining the ability to control exhaust for each processing unit through selective flow path switching.
Solution Approach 2:
The system uses a rotatable valve body with flow path switching holes that can dynamically redirect exhaust flow. By rotating the valve body to different positions, the system selectively connects different processing units to the common exhaust path, providing dynamic control without requiring a valve for each exhaust path.
2Reliability
If the number of valves is increased, then the exhaust control capability is improved, but the control time increases
Solution Approach 1:
Multiple valve functions are merged into a single rotatable valve body. Instead of controlling multiple separate valves, the system uses one valve body that can be rotated to achieve different flow path configurations, significantly reducing the control time required for exhaust switching while maintaining full control capability for all processing units.
Solution Approach 2:
The rotatable valve body performs multiple valve functions simultaneously. A single component with multiple flow path switching holes can connect different processing units to the common exhaust path by rotating to different positions, making the valve body a universal control element that replaces multiple specialized valves.
3Reliability
If the number of valves and driving mechanisms is increased, then the exhaust control for multiple chemical liquids is improved, but the space occupancy increases
Solution Approach 1:
Multiple separate valve assemblies and their driving mechanisms are merged into a single integrated rotatable valve body structure. This consolidation dramatically reduces the space required for exhaust control components while maintaining the ability to control exhaust for multiple chemical liquids and processing units.
Solution Approach 2:
The rotatable valve body serves as a universal component that replaces multiple individual valves and driving mechanisms. By providing multiple flow path switching holes in a single rotatable structure, the system achieves comprehensive exhaust control with minimal space occupancy.
Data Source
AI summary
Disclosed are a flow path switching apparatus and a fluid processing apparatus having a liquid processing unit that performs a processing by supplying different kinds of processing fluid to wafer W at different timings. The atmosphere of the liquid processing unit is discharged fluid to a plurality of exclusive exhaust paths through exhaust paths and flow path switching units. A flow path switching unit includes an outer tube having a plurality of connection holes and a rotary tube inserted into the outer tube having a plurality of openings. In particular, one of the plurality of openings of the rotary tube is aligned with one of the plurality of connection holes of the outer tube in such a way that only an aligned set of an opening of the rotary tube and a connection hole of the outer tube is sequentially communicated during the rotation of the rotary tube.