Rotary Axial Forging Sputter Targets for Diameter Consistency
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Solution Overview
Problem
Current methods for forming sputter targets are labor-intensive, time-consuming, and result in inconsistent grain size, crystal orientation, and diameter variations, requiring extensive machining for precise tolerances.
Innovation Solution
The method involves rotary axial forging of an ingot-derived preform in a closed die to shape and size the sputter target, achieving a continuous radial-circumferential grain and crystal structure pattern with minimal diameter variance, and a controlled texture gradient, significantly reducing production time and labor.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If traditional forging or milling methods are used to work a billet into the desired shape, then the sputter target can be formed, but the process becomes labor intensive and time consuming with large amounts of deformation work required
Solution Approach 1:
The patent replaces traditional multi-step mechanical forging and milling operations with a single-step rotary axial forging process. This substitution of the mechanical system achieves both ease of manufacture and reduced formation time by eliminating the need for multiple deformation steps and subsequent machining operations.
Solution Approach 2:
The patent changes the process parameters by using rotary axial forging with controlled rotation and axial pressure, transforming the material flow and deformation characteristics. This parameter change enables simultaneous achievement of desired shape, consistent grain structure, and reduced processing time compared to conventional methods.
2Manufacturing precision
If traditional forging or milling methods are used, then the sputter target can be formed, but large amounts of machining are required to obtain desired close tolerances and good surface finish
Solution Approach 1:
The patent applies preliminary action by performing the rotary axial forging to achieve near-final dimensions and consistent grain structure in a single step, rather than forming the shape first and then machining to tolerance. This preliminary formation action eliminates the need for subsequent machining operations while achieving the desired manufacturing precision.
Solution Approach 2:
The patent substitutes traditional sequential forging-machining operations with a single rotary axial forging process that directly produces the desired geometry and surface quality. This substitution eliminates the complex machining steps while maintaining or improving manufacturing precision through controlled deformation and grain structure.
3Shape
If traditional methods are used to form circular planar targets, then the target can be produced, but the circular shape has large variance in diameter around the target
Solution Approach 1:
The patent introduces dynamics through rotary axial forging, where the workpiece rotates during the forging process. This dynamic operation ensures uniform material flow and deformation around the entire circumference, eliminating the large diameter variance (10-15%) associated with static traditional forging methods while maintaining the desired circular shape.
Solution Approach 2:
The patent changes the deformation parameters by applying controlled axial pressure during rotation, creating uniform compressive forces that distribute evenly around the workpiece. This parameter change results in consistent diameter and improved circularity, reducing variance from 10-15% to within acceptable tolerances.
4Stability of the object's composition
If traditional forging methods are used, then the sputter target can be formed, but the grain size and crystal orientation are inconsistent
Solution Approach 1:
The rotary axial forging process introduces dynamic deformation that creates consistent grain flow patterns. The rotation during forging ensures uniform grain structure development across the entire workpiece, producing stable grain size and crystal orientation (such as <100> texture) while maintaining production efficiency through the single-step process.
Solution Approach 2:
The patent changes the deformation parameters by controlling rotation speed, axial pressure, and material temperature during rotary axial forging. These parameter changes create optimal conditions for grain refinement and texture development, resulting in consistent grain size and crystal orientation throughout the workpiece while maintaining high productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach results in a more consistent, cost-effective sputter target with reduced machining requirements, achieving a diameter variance of 5% or less and a uniform grain size and crystal orientation, enhancing sputtering efficiency and material utilization.
Implementation Method 1
rotary axial forging of an ingot derived preform to a shape and size of a sputter target
Data Source
AI summary
A method of making sputter targets using rotary axial forging is described. Other thermomechanical working steps can be used prior to and/or after the forging step. Sputter targets are further described which can have unique grain size and/or crystal structures.