Rotary Magnetron Assembly with Movable Magnet Bar for Sputtering
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The challenge in rotating-target magnetron sputtering is maintaining long-term stability and controlling magnetic flux as the target erodes, leading to variations in plasma confinement and sputtering efficiency, especially in reactive sputtering processes where precise film chemistry is required.
Innovation Solution
A magnetron assembly for rotary target cathodes with a movable magnet bar structure and motorized actuation mechanisms, coupled with a controller and battery module, allows for real-time adjustment of the magnetic field to compensate for target erosion, using internal motors, piezo-electric motors, or pneumatic/hydraulic systems, and enables remote communication through various signal methods to maintain process stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If target thickness is increased to improve economy and extend production campaigns, then the amount of usable material increases, but magnetic flux at the target surface becomes inadequate
Solution Approach 1:
The magnetron assembly is made dynamically adjustable through motorized mechanisms that can change the position of magnetic components and modify magnetic field strength in real-time. This allows the system to adapt to varying target thicknesses and maintain optimal magnetic flux throughout the sputtering process.
Solution Approach 2:
The system changes operational parameters including magnetic field strength, magnetron voltage, and gas flow rates to compensate for target erosion and thickness variations. These parameter adjustments ensure consistent sputtering performance regardless of target material quantity.
2Ease of manufacture
If standard magnetron assemblies are used with thicker targets, then fabrication cost is reduced, but magnetic flux becomes inadequate for maintaining plasma confinement
Solution Approach 1:
Rather than using fixed, over-designed magnetron assemblies, the invention employs dynamically adjustable components that can be optimized for each specific target thickness. This reduces fabrication costs while maintaining reliable magnetic flux through real-time adjustment capabilities.
Solution Approach 2:
The magnetron assembly includes self-adjusting mechanisms with sensors that monitor plasma conditions and automatically modify magnetic field parameters to maintain optimal operation, eliminating the need for conservative over-design.
3Manufacturing precision
If reactive gas amount is increased to achieve desired film chemistry, then film composition is improved, but target surface reactions increase and ablation rate decreases
Solution Approach 1:
The system dynamically adjusts multiple parameters including reactive gas flow rates, magnetron power, and magnetic field strength to achieve the desired film chemistry while maintaining acceptable ablation rates. These coordinated parameter changes allow optimization of both film quality and productivity.
Solution Approach 2:
Real-time monitoring of film composition and sputtering rate provides feedback that drives automatic adjustments of reactive gas admission and power delivery, maintaining optimal balance between film chemistry and ablation rate throughout the process.
4Duration of action of moving object
If target erosion is allowed to proceed naturally, then production campaigns can run longer, but magnetic field strength increases and plasma confinement varies
Solution Approach 1:
The magnetron assembly incorporates dynamic adjustment mechanisms that compensate for target erosion by modifying magnetic field parameters in real-time. This maintains stable plasma confinement throughout extended production campaigns despite changing target geometry.
Solution Approach 2:
Sensors monitor plasma conditions and target erosion progress, providing feedback that drives automatic adjustments of magnetic field strength and configuration to maintain consistent plasma confinement and sputtering performance throughout the target lifetime.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution ensures consistent magnetic flux and improved sputtering efficiency by dynamically adjusting the magnetic field as the target erodes, enhancing the stability and control of the sputtering process, particularly in reactive sputtering, and allowing for longer production campaigns without significant cost increases.
Implementation Method 1
A magnetron assembly is disposed within the tube and supplies magnetic flux, which permeates the target such that there is adequate magnetic flux at the outer surface of the target. The magnetic field produced by the magnetron assembly is designed in a way such that it retains electrons emitted from the target so as to increase the probability that they will have ionizing collisions with the working gas
Implementation Method 2
drive modules each including a motorized actuation mechanism operatively coupled to the magnet bar structure
Implementation Method 3
the battery configured to energize each motorized actuation mechanism and the electronic controller
Implementation Method 4
one or more power generation modules coupled to the support structure and in electrical communication with the battery such that electrical energy output from the power generation modules recharges the battery
Data Source
Figure 1~3
Figure 4~6
Figure 7~8
AI summary
A magnetron assembly for a rotary target cathode comprises an elongated support structure, a magnet bar structure movably positioned below the support structure, and a plurality of drive modules coupled to the support structure. The drive modules each include a motorized actuation mechanism operatively coupled to the magnet bar structure. A controller and battery module is coupled to the support structure and is in operative communication with the drive modules. The controller and battery module includes an electronic controller and at least one rechargeable battery. The battery is configured to energize each motorized actuation mechanism and the electronic controller. One or more power generation modules is coupled to the support structure and in electrical communication with the battery, such that electrical energy output from the power generation modules recharges the battery.