Rotary Reference Mirror Converter for Linnik Interferometer
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Solution Overview
Problem
Interference microscopes, particularly Linnik-type, face challenges in performing two-dimensional measurements due to interference patterns, which hinder quantitative shape verification and binarization processing, and struggle to enhance image visibility and intensity for three-dimensional measurements.
Innovation Solution
A reference mirror converter for a Linnik interferometer that includes a rotary plate with multiple reference mirrors of varying reflectivity, allowing for the selection of a mirror with similar reflectivity to the target, and a shielding mechanism to prevent interference, enabling two-dimensional measurements and improving three-dimensional image visibility and intensity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If a Linnik-type interference lens is used for three-dimensional measurement, then the visibility and intensity of the 3D image can be enhanced by selecting a reference mirror with matching reflectivity, but two-dimensional measurement is hindered due to interference patterns
Solution Approach 1:
The reference mirror is made rotatable to dynamically switch between different operational modes. By rotating the reference mirror to different angular positions, the system can toggle between 3D measurement mode (where the mirror reflects light back through the objective lens to create interference patterns) and 2D measurement mode (where the mirror is rotated to shield or redirect light, preventing interference). This dynamic reconfiguration allows a single device to perform both measurement types effectively.
Solution Approach 2:
The system changes the angular position parameter of the reference mirror to alter its functional state. At specific angles, the mirror enables interference patterns for 3D measurement; at other angles, it shields or redirects light to eliminate interference for 2D measurement. This parameter-based switching resolves the contradiction by allowing the same optical component to serve different measurement purposes.
2Loss of information
If light reflected from the reference mirror is allowed to create interference patterns, then three-dimensional shape information can be obtained, but two-dimensional measurement and binarization processing become difficult
Solution Approach 1:
The rotatable reference mirror enables dynamic switching between information retrieval mode and processing mode. In information retrieval mode, the mirror is positioned to allow interference, capturing 3D shape data. In processing mode, the mirror is rotated to shield light, eliminating interference patterns and enabling clear 2D binarization processing. This dynamic approach allows both functions to be performed sequentially with the same hardware.
3Device complexity
If a single reference mirror is used in the Linnik interferometer, then the device structure remains simple, but the ability to adapt to different measurement requirements (2D vs 3D) is limited
Solution Approach 1:
Instead of using multiple static reference mirrors, the invention employs a single rotatable reference mirror that can be dynamically positioned. This dynamic configuration provides measurement mode flexibility equivalent to having multiple mirrors, while maintaining simpler device structure. The rotation mechanism allows the single mirror to assume different functional roles, achieving versatility without proportionally increasing complexity.
Solution Approach 2:
The single rotatable reference mirror serves multiple functions: it can be positioned to enable 3D interference measurement, positioned to enable 2D non-interference measurement, and potentially positioned at intermediate angles for other measurement modes. This multi-functionality of a single component resolves the contradiction between structural simplicity and measurement adaptability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables two-dimensional measurements by shielding light from the reference mirror and enhances three-dimensional image visibility and intensity by selecting a reference mirror with matching reflectivity, overcoming the limitations of traditional interference microscopes in quantitative shape verification and image quality.
Implementation Method 1
a beam splitter configured to transmit or reflect a portion of light irradiated from a light source or a portion of light emitted from the second object lens to be directed toward the camera
Implementation Method 2
a plurality of reference mirrors configured to reflect light incident from the first object lens
Implementation Method 3
a first object lens configured to focus light emitted from the beam splitter on the reference mirror; a second object lens configured to enable a camera to take a picture of an image magnified from a target
Implementation Method 4
an interference pattern that is generated as a phenomenon that two waves encounter and perform reinforcing and extinctive interference
Data Source
AI summary
Provided is a reference mirror converter of a Linnik interferometer in which a first object lens 30 focuses light emitted from a beam splitter 20 on a reference mirror 40, a plurality of reference mirrors 40 reflects light incident from the first object lens 30, a plurality of reference mirrors 40 is disposed on a plurality of reference mirror brackets 45, respectively, the plurality of reference mirror brackets 45 is disposed on a rotary plate 60 at the same angles, and the rotary plate 60 is rotated using a motor 70 to control a rotation of the rotary plate 60 to select the reference mirror 40 having a reflectivity similar to that of a target 200 to be measured from among the plurality of reference mirrors 40. Accordingly, since a separate state between articles is maintained at all times, adhesiveness between articles packaged with an easily adhesive material may be prevented.