Rotary Substrate Loader With Dual Arms for Faster Wafer Transfer
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Solution Overview
Problem
Current substrate loading apparatuses in semiconductor inspection systems are inefficient, leading to reduced throughput due to time-consuming inspection processes and transfer times between inspection stations.
Innovation Solution
A loading module with two arms, rotatable support members, and a conveyor system, where actuators rotate the arms to position grippers over a conveyor belt for efficient substrate transfer between cassette holders and the conveyor, allowing for simultaneous picking up and loading of substrates in an indexing fashion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If comprehensive inspection processes are used, then inspection quality is improved, but inspection time increases and throughput decreases
Solution Approach 1:
The inspection system is divided into multiple independent inspection stations, each performing a specific inspection function. This allows substrates to be inspected at multiple points without requiring sequential processing at a single complex station, thereby maintaining comprehensive inspection quality while reducing overall inspection time and improving throughput.
Solution Approach 2:
Substrates are pre-positioned in cassettes and pre-aligned using alignment marks before entering the inspection system. This preliminary preparation reduces the time required during actual inspection operations, allowing comprehensive inspections to be performed without compromising throughput.
2Reliability
If multiple inspection stations are used, then inspection completeness is improved, but transfer time between stations increases
Solution Approach 1:
Multiple inspection stations are merged into a single integrated rotary inspection system where substrates are loaded once and inspected at multiple stations during rotation. This eliminates the need for physical transfer between separate stations, maintaining inspection completeness while eliminating transfer time losses.
Solution Approach 2:
The rotary inspection system enables continuous inspection operations where substrates are constantly being inspected at different stations during rotation. This continuous operation eliminates idle transfer time between stations, maintaining comprehensive inspection while maximizing productivity.
3Device complexity
If traditional loading apparatuses are used, then device simplicity is maintained, but loading efficiency decreases
Solution Approach 1:
The loading apparatus uses a rotary mechanism with movable arms that can dynamically position grippers to pick up substrates from cassettes and place them on the conveyor. This dynamic positioning system maintains relative mechanical simplicity while dramatically improving loading efficiency by enabling rapid, automated substrate handling at high speeds.
4Productivity
If faster substrate transfer is implemented, then throughput is improved, but substrate damage risk increases
Solution Approach 1:
The system replaces traditional mechanical contact-based substrate handling with a vacuum gripper system that holds substrates through suction. This allows for high-speed transfer operations while minimizing mechanical contact and potential damage, as the vacuum grip provides secure holding without physical clamping forces that could crack or scratch substrates.
Data Source
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AI summary
A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module for a substrate inspection station is disclosed herein. The loading module includes two arms, a plurality of substrate grippers, two rotatable support members, a conveyor, and at least one actuator. Each arm has a first end and a second end, wherein the second end is opposite the first end. Each substrate gripper is disposed at a respective end of each arm. Each rotatable support member is coupled to a respective one of the arms. The conveyor is disposed between the rotatable support members. The at least one actuator is configured to rotate the arms about the rotatable support members to selectively position the grippers over the conveyor in a location that allows a substrate held by the gripper to be released onto the conveyor.