Rotary Substrate Temperature Measurement via Optical Thickness
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Solution Overview
Problem
Existing temperature measurement systems for substrates in processing containers lack accuracy and efficiency in non-contact, multi-substrate temperature measurement, particularly in rotary table-based systems where substrates are rotated and processed simultaneously.
Innovation Solution
A temperature measurement system comprising a thickness calculating unit, rotation position detecting unit, substrate specifying unit, storage unit, and temperature calculating unit that calculates substrate temperature based on optical thickness and pre-stored relationship information between temperature and thickness changes, enabling accurate temperature measurement of multiple substrates during rotation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If optical interference thermometer is used for non-contact temperature measurement, then temperature measurement capability is provided, but measurement precision is insufficient for multi-substrate systems
Solution Approach 1:
The patent divides the temperature measurement system into multiple independent measurement channels, each dedicated to measuring the temperature of a specific substrate. The thickness calculating unit is configured to calculate optical thickness for each substrate individually, and the temperature calculating unit determines temperature for each substrate separately based on its optical thickness and pre-stored relationship information. This segmentation enables precise multi-substrate temperature measurement without requiring a single complex measurement system.
Solution Approach 2:
The patent pre-stores relationship information between optical thickness and temperature for each substrate type in the storage unit before measurement begins. This preliminary preparation of calibration data allows the temperature calculating unit to quickly and accurately determine substrate temperatures during rotation without real-time complex calculations, improving measurement precision while maintaining system efficiency.
2Productivity
If multiple substrates are measured simultaneously during rotation, then productivity is improved, but measurement precision deteriorates due to rotation position variations
Solution Approach 1:
The patent incorporates a rotation position detecting unit that continuously monitors the angular position of the rotary table during substrate rotation. This rotation position information is fed back to the temperature calculating unit, which uses it to identify which substrate is currently in the measurement position and to apply the correct relationship information from storage. This feedback mechanism ensures accurate temperature measurement for each substrate despite continuous rotation, maintaining measurement precision while enabling high-productivity simultaneous measurement of multiple substrates.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and efficient temperature measurement of multiple substrates in a processing container, ensuring accurate processing conditions and minimizing temperature differences among substrates.
Implementation Method 1
a method of using an optical interference thermometer is known
Data Source
AI summary
A temperature measurement system includes: a thickness calculating unit that calculates an optical thickness of a substrate; a rotation position detecting unit that detects rotation position information of the rotary table; a substrate specifying unit that specifies a substrate based on the rotation position information; a storage unit that stores first relationship information indicating a relationship between a temperature and a thickness associated with each substrate, and second relationship information indicating a relationship between an amount of change in temperature and an amount of change in optical thickness associated with each substrate; and a temperature calculating unit that calculates a temperature of the substrate based on the optical thickness calculated by the thickness calculating unit, the substrate specified by the substrate specifying unit, the first relationship information, and the second relationship information.