Rotary Table Support Clearance Layout for Thermal Centering Stability

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Solution Overview

Problem

Existing substrate processing apparatuses face challenges in maintaining stable substrate support due to temperature changes, as the thermal expansion differences between ceramic stages and metal supports lead to misalignment and potential breakage during film deposition processes.

Innovation Solution

The apparatus incorporates a support system with a thermal expansion coefficient greater than the rotary table or stage, featuring a protruding portion and a base portion with specific clearances that adjust with temperature changes to maintain accurate centering and stability, using a ceramic stage and metal support with a connection structure that includes an outer edge protruding portion and an insertion portion to accommodate thermal expansion differences.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a metal support is used to support a ceramic stage, then the support structure is strong and durable, but thermal expansion differences cause misalignment and instability during temperature changes

Engineering Contradiction:
Improvesupport strengthVSAvoidalignment stability
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The patent applies thermal expansion principles by designing a connection structure where the metal support and ceramic stage have different thermal expansion coefficients. The support includes an insertion portion that fits into a protruding portion of the stage, with clearances designed to accommodate differential thermal expansion. The outer clearance is smaller than the inner clearance, allowing the metal support to expand more than the ceramic stage without causing misalignment or breakage during temperature changes.

Inventive Principle:
Principle #37Thermal expansion

Solution Approach 2:

The patent uses composite materials by combining metal support components with ceramic stage components. The metal support provides structural strength and durability, while the ceramic stage provides thermal stability. The connection structure integrates these different materials with carefully designed clearances to accommodate their different thermal properties, creating a reliable composite support system.

Inventive Principle:
Principle #40Composite materials

2Manufacturing precision

If the clearance between support and stage is small, then centering precision is high, but thermal expansion causes contact and misalignment

Engineering Contradiction:
Improvecentering precisionVSAvoidthermal expansion accommodation
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent designs the clearance between the support and stage to account for thermal expansion. The outer clearance is intentionally made smaller than the inner clearance, creating a gradient that allows the metal support to expand radially outward during heating without contacting the ceramic stage. This prevents misalignment while maintaining good centering precision.

Inventive Principle:
Principle #37Thermal expansion

Solution Approach 2:

The patent applies local quality by having different clearance dimensions at different locations of the connection structure. The outer clearance is smaller than the inner clearance, creating a non-uniform clearance distribution that optimizes both centering precision and thermal expansion accommodation. This localized variation in clearance allows the structure to handle thermal stresses effectively while maintaining precision.

Inventive Principle:
Principle #3Local quality

3Reliability

If the outer clearance is made smaller than inner clearance, then thermal expansion is accommodated, but manufacturing complexity increases

Engineering Contradiction:
Improvethermal expansion accommodationVSAvoidconnection structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent addresses thermal expansion by designing a simple yet effective clearance gradient in the connection structure. The outer clearance is made smaller than the inner clearance, creating a radial expansion path for the metal support during heating. This straightforward geometric design accommodates thermal expansion without requiring complex mechanisms or additional components.

Inventive Principle:
Principle #37Thermal expansion

Solution Approach 2:

The patent uses parameter changes by varying the clearance dimension radially across the connection structure. The clearance transitions from larger at the inner radius to smaller at the outer radius, creating a gradient that naturally accommodates thermal expansion. This parameter variation is achieved through simple geometric design rather than complex mechanisms.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration ensures stable support of substrates across varying temperatures, preventing misalignment and breakage, and maintaining the connection state even under high-speed rotation, thereby enhancing the reliability and longevity of the substrate processing apparatus.

Implementation Method 1

the support having a thermal expansion coefficient greater than a thermal expansion coefficient of the rotary table or the stage that is supported

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS20240060181A1Substrate processing apparatus
Publication Date: 2024.02.22 TOKYO ELECTRON LTD
  • US20240060181A1 patent drawing
  • US20240060181A1 patent drawing
  • US20240060181A1 patent drawing

AI summary

A substrate processing apparatus includes a vacuum chamber, a rotary table in the vacuum chamber, a stage, and a support that supports at least either the rotary table or stage, the support having a thermal expansion coefficient greater than the rotary table or stage that is supported. The rotary table or stage includes a protruding portion protruding toward the support. The support includes a base portion, an insertion portion protruding from a center of the base portion and being inserted into the protruding portion, and an outer edge protruding portion protruding from the base portion. An outer clearance formed between the outer edge protruding portion and the protruding portion is set to be smaller than an inner clearance formed between the insertion portion and the protruding portion at a first temperature, and the outer clearance becomes greater than the inner clearance at a second temperature higher than the first temperature.