Rotary Workpiece Processing With Eccentricity Compensation

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Solution Overview

Problem

Existing processing systems face challenges in accurately processing objects due to misalignment between the rotational axis of the stage and the ideal rotational axis of the workpiece, leading to variations in the irradiation position of processing light, which affects the precision and quality of the processed object.

Innovation Solution

The processing system incorporates a measurement apparatus to calculate the eccentric amount between the rotational axis of the stage and the workpiece, allowing for adjustments in the movement of the processing head and stage to maintain precise alignment, ensuring accurate irradiation and processing even when the workpiece is displaced relative to the processing head during rotation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the stage rotates the workpiece without alignment compensation, then the processing system is simple to operate, but the irradiation position varies causing poor manufacturing precision

Engineering Contradiction:
Improveirradiation position accuracyVSAvoidalignment measurement and compensation system
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The system performs preliminary alignment measurement by capturing images of the workpiece at different rotational positions before actual processing. The control apparatus calculates the eccentric amount and determines compensation trajectories in advance, so that when processing occurs, the necessary corrections are already prepared and applied automatically.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The measurement apparatus provides feedback about the workpiece position and orientation by capturing images during rotation. The control apparatus uses this feedback to calculate the actual eccentric amount and adjusts the processing trajectory in real-time to compensate for misalignment, ensuring accurate irradiation positioning.

Inventive Principle:
Principle #23Feedback

2Manufacturing precision

If the processing head remains stationary while the stage rotates, then the device structure is simple, but the processing precision deteriorates due to workpiece displacement

Engineering Contradiction:
Improveprocessing precisionVSAvoidcoordinate transformation and trajectory compensation system
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

Instead of mechanically adjusting the processing head to track the workpiece, the system uses computational methods to substitute for mechanical complexity. The control apparatus performs coordinate transformations and trajectory calculations based on measured eccentricity, replacing complex mechanical tracking mechanisms with software-based compensation.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Manufacturing precision

If alignment measurement is performed, then manufacturing precision improves, but the processing time increases due to additional measurement steps

Engineering Contradiction:
Improvealignment accuracyVSAvoidmeasurement and processing time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The system merges the measurement and processing operations by capturing workpiece images during the rotation phase that is already necessary for processing. The same rotational movement used for processing also enables alignment measurement, eliminating the need for separate measurement steps and reducing overall processing time.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS20230079144A1Processing system
Publication Date: 2023.03.16 NIKON CORP
  • US20230079144A1 patent drawing
  • US20230079144A1 patent drawing
  • US20230079144A1 patent drawing

AI summary

A processing system includes: a processing apparatus for processing an object; a rotation apparatus for rotating a holding part holding the object; a movement apparatus for moving at least one of the processing apparatus and the holding part; a measurement apparatus for measuring at least a part of the object held by the holding part; and a control apparatus for controlling the movement apparatus and the rotation apparatus based on a measured result by the measurement apparatus to rotate the holding part and to move at least one of the processing apparatus and the holding part