Rotatable AC Power Connector for RF Sputtering Vacuum Systems

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Solution Overview

Problem

Existing RF sputtering systems face challenges in efficiently providing power to rotatable targets due to difficulties in AC feed-throughs, particularly in vacuum environments where high-frequency AC power needs to be effectively transferred.

Innovation Solution

An AC power connector is designed with rotatable elements that form a capacitor, allowing for capacitive coupling to transfer high-frequency AC power from an AC power supply to a rotatable target within a vacuum chamber, utilizing a configuration where the elements are arranged at a specific distance and can rotate coaxially to optimize power transfer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If conventional AC feed-throughs are used to provide power to rotatable targets, then power transfer is simple in structure, but power transfer efficiency is poor and plasma occurrence increases

Engineering Contradiction:

Improvepower transfer efficiencyVSAvoidconnector structure complexity

Core Design Contradiction:

Loss of energyVSDevice complexity

Solution Approach 1:

The patent introduces a capacitive coupling mechanism as an intermediary between the AC power supply and the rotatable target. The capacitor transfers AC power through the vacuum chamber wall without direct electrical connection, eliminating plasma occurrence at the feed-through while maintaining efficient power transfer to the rotating target.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces conventional mechanical electrical feed-throughs with a capacitive coupling system. Instead of using sliding contacts or rotary connectors that require direct electrical contact, the system uses electric field coupling through the chamber wall, substituting mechanical electrical connection with electromagnetic field interaction.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If conventional feed-throughs are used, then the structure is simple, but plasma occurrence increases and operational life decreases

Engineering Contradiction:

Improveoperational life of rotatable targetVSAvoidAC power connector structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The capacitor serves as an intermediary that transfers power without direct contact, eliminating the plasma formation that occurs at conventional feed-through interfaces. This protects the rotatable target from plasma damage and extends its operational life.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent extracts the electrical connection from the mechanical feed-through path by using capacitive coupling through the vacuum chamber wall. This separates the power transfer function from the mechanical rotation interface, eliminating plasma-related reliability issues.

Inventive Principle:

Principle #2Taking out (Extraction)

3Loss of energy

If direct AC power connection is made to rotatable target, then connection is straightforward, but power transfer efficiency at high frequency is poor

Engineering Contradiction:

ImproveAC power transfer efficiencyVSAvoidpower connection simplicity

Core Design Contradiction:

Loss of energyVSEase of operation

Solution Approach 1:

The patent substitutes direct mechanical electrical connection with capacitive coupling. The capacitor is configured with specific geometry (parallel plates or cylindrical) to optimize high-frequency AC power transfer through the vacuum chamber wall, achieving efficient power delivery without direct contact.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent optimizes the capacitor geometry parameters (plate area, distance between plates, or cylindrical dimensions) to achieve resonant coupling at the operating frequency. By adjusting these parameters, the system maximizes power transfer efficiency for high-frequency AC signals.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables efficient transfer of up to 10 kW of AC power with adjustable capacitance, reducing plasma occurrence and extending the operational life of rotatable targets, thus improving the efficiency and cost-effectiveness of RF sputtering processes.

Implementation Method 1

the first element and the second elements being arranged at a first distance with respect to each other for defining a capacitance

Methodology Applied

Scientific EffectCapacitance: Capacitance

Implementation Method 2

allowing for capacitive coupling to transfer high-frequency AC power from an AC power supply to a rotatable target

Methodology Applied

Scientific EffectCapacitive coupling:

Data Source

PatentUS10818475B2AC power connector, sputtering apparatus and method therefor

Publication Date: 2020.10.27 APPLIED MATERIALS INC

AI summary

An AC power connector for connecting an AC power supply with a device is provided. The AC power connector includes at least one first element connectable with the AC power supply and at least one second element connectable with the device, the first element and the second elements being arranged at a first distance with respect to each other for defining a capacitance, wherein the at least one first element and the at least one second element are rotatable with respect to each other, wherein the first element and the second element are configured for a transfer of an AC power between the at least one first element and the at least one second element.