Independently Rotatable Robot Booms for Twin Chamber Alignment
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Solution Overview
Problem
Conventional electronic device manufacturing systems face challenges in efficiently and precisely transporting substrates between process chambers, particularly in systems with twin chambers, where misalignment issues occur due to the limited versatility and adjustability of existing robots, leading to processing anomalies and increased costs.
Innovation Solution
A robot apparatus with independently rotatable booms and arms, allowing for lateral and longitudinal misalignment correction, is designed to transport substrates between twin process chambers and load lock chambers, featuring coaxial drive shafts and motors located outside the transfer chamber to reduce system size and eliminate the need for expensive seals.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional robots are used to transport substrates between chambers, then the system structure is simple, but misalignment occurs between twin chambers reducing precision
Solution Approach 1:
The robot is divided into two independent booms (first boom and second boom) that can rotate independently about common coaxial rotational axes. Each boom has its own drive shaft and motor, allowing separate control and positioning. This segmentation enables independent adjustment of each boom to correct misalignment between twin chambers while maintaining overall system coordination.
Solution Approach 2:
The robot employs dynamically adjustable booms with independent rotational capabilities about coaxial axes. The booms can change their relative positions and orientations dynamically during substrate transport operations, allowing real-time correction of alignment issues between chambers while adapting to different chamber configurations.
2Ease of manufacture
If robot components are located inside the transfer chamber, then the system is compact, but expensive seals are required increasing cost
Solution Approach 1:
The drive shafts and motors are extracted from the transfer chamber and positioned in external locations. The first drive shaft and second drive shaft are located outside the transfer chamber, eliminating the need for complex sealing mechanisms that would be required if these rotating components were housed inside the vacuum chamber. This extraction reduces system cost while maintaining functional integrity.
3Adaptability or versatility
If conventional single-boom robots are used, then the device is simple, but versatility in handling twin chambers is limited
Solution Approach 1:
The dual-boom configuration with independent rotational capabilities about coaxial axes provides universal functionality for handling multiple chamber types and configurations. The system can service twin chambers, load lock chambers, and process chambers with a single robot design, adapting to different chamber arrangements through coordinated boom movements rather than requiring separate specialized robots.
Data Source
AI summary
Electronic device processing systems and robot apparatus are described. The systems and apparatus are adapted to efficiently pick or place substrates into twin chambers by having independently rotatable first and second booms, and independently rotatable first and second upper arms, wherein each upper arm has a forearm, a wrist member, and an end effector adapted to carry a substrate coupled thereto. The boom members and upper arms are driven through co-axial drive shafts in some embodiments. Co-axial and non-coaxial drive motors are disclosed. Methods of operating the robot apparatus and processing systems are provided, as are numerous other aspects.