Rotatable Cutting Bevel for Perpendicular Specimen Alignment

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Solution Overview

Problem

In particle beam apparatuses, such as electron and ion beam microscopes, the alignment of exposed areas cut by a microtome within the specimen chamber is often not perpendicular to the particle beam, leading to suboptimal imaging and analysis due to the tilt of the particle beam column or other structural limitations.

Innovation Solution

An object preparation device with a cutting bevel that can be rotated and moved in a cutting plane, ensuring the exposed area is always aligned perpendicular to the particle beam axis, utilizing adjustable stages and rotation axes to maintain optimal alignment during cutting and imaging processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a microtome is used to cut exposed areas in the specimen chamber, then material can be removed and exposed areas can be created, but the exposed areas are not aligned perpendicular to the particle beam due to tilt of the particle beam column or structural limitations

Engineering Contradiction:
Improvealignment precision of exposed areaVSAvoidstructural complexity of particle beam apparatus
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The cutting bevel is made rotatable about an axis perpendicular to the cutting plane, allowing dynamic adjustment of the cutting orientation. This enables the exposed area to be realigned perpendicular to the particle beam direction, resolving the alignment precision issue while maintaining the existing particle beam apparatus structure.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The solution introduces rotation about an axis perpendicular to the cutting plane, adding a rotational degree of freedom in a new dimension. This allows the cutting bevel to be oriented at different angles, enabling perpendicular alignment of the exposed area with the particle beam without modifying the beam column tilt.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Ease of operation

If the particle beam column is tilted for structural reasons, then the apparatus can be compactly arranged, but the exposed areas cut by the microtome cannot be aligned perpendicular to the beam

Engineering Contradiction:
Improveoperational flexibility for alignmentVSAvoidperpendicular alignment of exposed area
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The cutting bevel is made rotatable about an axis perpendicular to the cutting plane, allowing dynamic adjustment of the cutting orientation. This enables the exposed area to be realigned perpendicular to the particle beam direction, resolving the alignment precision issue while maintaining the existing particle beam apparatus structure.

Inventive Principle:
Principle #15Dynamics

3Manufacturing precision

If the cutting bevel is fixed in position, then the device structure is simple, but the exposed area cannot be properly aligned with the particle beam axis

Engineering Contradiction:
Improvealignment of exposed area to beam axisVSAvoidadjustment mechanisms for cutting bevel
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The cutting bevel is made rotatable about an axis perpendicular to the cutting plane, allowing dynamic adjustment of the cutting orientation. This enables the exposed area to be realigned perpendicular to the particle beam direction, resolving the alignment precision issue while maintaining the existing particle beam apparatus structure.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The cutting bevel can be pre-aligned perpendicular to the particle beam axis before the cutting operation begins. This preliminary alignment ensures that the exposed area will be properly oriented for imaging, eliminating the need for complex realignment mechanisms during operation.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS10483084B2Object preparation device and particle beam device having an object preparation device and method for operating the particle beam device
Publication Date: 2019.11.19 CARL ZEISS MICROSCOPY GMBH
  • US10483084B2 patent drawing
  • US10483084B2 patent drawing
  • US10483084B2 patent drawing

AI summary

The system described herein relates to an object preparation device for preparing an object in a particle beam apparatus. By way of example, the particle beam apparatus is an electron beam apparatus and/or an ion beam apparatus. The system described herein moreover relates to a particle beam apparatus having such an object preparation device and to a method for operating the particle beam apparatus. The object preparation device may have an object receptacle device for receiving the object, a cutting device and a cutting bevel for cutting the object, wherein the cutting bevel may be arranged at the cutting device. The cutting bevel may lay in a cutting plane. Further, an axis of rotation may lay in the cutting plane. The cutting bevel may be embodied to be rotatable about the axis of rotation.