Rotatable Faraday Cleaning Assembly for ICP Reactor Dead Angles
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Solution Overview
Problem
Existing ICP reactor cavities are inconvenient to clean due to fixed mounting and numerous dead angles, making comprehensive interior cleaning challenging.
Innovation Solution
A rotatable Faraday cleaning apparatus and plasma processing system with a rotatable cleaning mechanism, including a cavity cover, motor, eccentric wheel, long-petalled and short-petalled assemblies, gas intake nozzle, and sector-shaped conductors, which allows for effective rotation and comprehensive cleaning of the coupling window, facilitated by a rotating shaft and hinges for even coverage and sealing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a conventional fixedly mounted reactor cavity is used, then the structure is simple and stable, but the cleaning convenience deteriorates due to dead angles and inability to access all interior surfaces
Solution Approach 1:
The patent applies the dynamics principle by transforming the fixed mounting structure into a rotatable cleaning mechanism. The cavity cover with integrated cleaning components can rotate to different positions, enabling dynamic access to all interior surfaces including previously unreachable dead angles. This rotational movement allows the cleaning apparatus to adapt its position for comprehensive cleaning while maintaining structural stability when positioned.
2Ease of operation
If the cavity cover is made rotatable for comprehensive cleaning, then the cleaning coverage improves, but the sealing reliability may deteriorate
Solution Approach 1:
The patent applies segmentation by dividing the cavity cover into modular components including the cleaning mechanism that can be independently positioned and secured. The sealing structure is also segmented with separate sealing elements that can maintain integrity during rotation. This modular design allows the cleaning components to rotate for comprehensive coverage while sealing elements remain effective at each position.
3Productivity
If a rotatable cleaning mechanism is added, then the cleaning effectiveness improves, but the device complexity increases
Solution Approach 1:
The patent applies universality by designing the cavity cover to serve multiple functions: it acts as both a sealing component for the reactor cavity and as a mounting structure for the rotatable cleaning mechanism. The cleaning mechanism itself integrates multiple cleaning functions in one rotating assembly, reducing the need for separate cleaning devices. This multi-functionality improves cleaning effectiveness while limiting the increase in overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and thorough cleaning of ICP reactor cavities, addressing the inconvenience of existing systems by ensuring even coverage of internal surfaces and preventing incomplete cleaning of dead corners, while maintaining effective operation and sealing.
Implementation Method 1
the rotatable cleaning mechanism includes a cavity cover, a motor, an eccentric wheel, a long-petalled assembly, a coupling window, a gas intake nozzle, a connecting rod, a short-petalled assembly
Data Source
AI summary
The present invention provides a rotatable faraday cleaning apparatus and a plasma processing system, said apparatus comprising a cavity cover, a motor, an eccentric wheel, a long-petalled assembly, a coupling window, a gas intake nozzle, a connecting rod, a short-petalled assembly, a first sector-shaped conductor, and a second sector-shaped conductor; the cavity cover is assembled on a reactor cavity main body, the coupling window is mounted on the cavity cover, the gas intake nozzle is provided on the coupling window, the first sector-shaped conductor is assembled on the gas intake nozzle, the second sector-shaped conductor is assembled on the gas intake nozzle, the long-petalled assembly is assembled on the gas intake nozzle, the short-petalled assembly is assembled on the gas intake nozzle, the connecting rod is assembled on the long-petalled assembly, the eccentric wheel is assembled on the connecting rod, and the motor is mounted on the eccentric wheel.