Coater with Rotatable Magnetrons for Large-Area Uniform Coating

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Solution Overview

Problem

State-of-the-art coaters with rotatable magnetrons have a limited coating zone, requiring substrate movement for large-area coatings and resulting in material losses and uneven coating thickness.

Innovation Solution

A coater configuration with multiple rotatable, curved magnetron cathodes positioned beside each other, utilizing magnetic field arrays and adjustable magnets to create a large, even coating zone with reduced material loss, allowing static coating of large-area substrates without substrate movement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If two rotatable magnetrons are positioned side by side in a coating chamber, then plasma formation and stabilization is improved, but the coating zone area remains limited requiring substrate movement for large-area coatings

Engineering Contradiction:

Improveplasma stabilizationVSAvoidcoating zone area

Core Design Contradiction:

ReliabilityVSArea of stationary object

Solution Approach 1:

The coating system is segmented into multiple independent magnetron cathodes (at least three, preferably four, five, six or more) positioned side by side in the coating chamber. Each cathode functions as an independent plasma source and coating applicator, allowing the system to cover large substrate areas without requiring substrate movement while maintaining stable plasma conditions at each location.

Inventive Principle:

Principle #1Segmentation

2Area of stationary object

If multiple cathodes are positioned side by side to create a large coating zone, then coating area is improved, but material loss in the form of overspray increases

Engineering Contradiction:

Improvecoating zone areaVSAvoidcoating material loss

Core Design Contradiction:

Area of stationary objectVSLoss of substance

Solution Approach 1:

The invention employs rotatable magnetrons with cylinder-tube-like curved targets instead of flat planar targets. The curved surface geometry of the rotating cathodes directs the sputtered coating material more efficiently toward the substrate, reducing lateral dispersion and overspray. This curvature effect maintains low material loss even when multiple cathodes are used to cover large substrate areas.

Inventive Principle:

Principle #14Spheroidality (Curvature)

3Area of stationary object

If substrates are moved to coat large surfaces with limited coating zone, then coating area coverage is improved, but coating uniformity deteriorates due to movement and repositioning

Engineering Contradiction:

Improvecoating area coverageVSAvoidcoating thickness uniformity

Core Design Contradiction:

Area of stationary objectVSManufacturing precision

Solution Approach 1:

Instead of moving the substrate to achieve coverage of large areas (conventional approach), the invention inverts the approach by keeping the substrate stationary and expanding the coating zone through multiple side-by-side cathodes. This eliminates movement-related non-uniformities while achieving large-area coverage through the combined output of multiple cathodes with curved targets.

Inventive Principle:

Principle #13The other way round (Inversion)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Achieves even coating thickness across large areas with minimized material loss by using multiple rotatable magnetron cathodes with adjustable magnetic fields, enhancing coating uniformity and reducing material waste.

Implementation Method 1

magnet assemblies behind the sputter target facilitate plasma formation in front of the target, at the same time stabilizing the plasma

Methodology Applied

Scientific EffectMagnetic field: Magnetic Field

Implementation Method 2

magnet assemblies behind the sputter target facilitate plasma formation in front of the target

Methodology Applied

Scientific EffectPlasma: Plasma

Implementation Method 3

the coating material to be sputtered is configured in the shape of a flat, planar target... the target surfaces of so-called rotatable cathodes are curved... Due to the continuous rotation of a cylinder-like tube during the coating process, the target material is sputtered evenly

Methodology Applied

Scientific EffectSputtering: Sputtering

Data Source

PatentUS8137510B2Coater with a large-area assembly of rotatable magnetrons

Publication Date: 2012.03.20 APPLIED MATERIALS GMBH & CO KG

AI summary

This invention relates to a coater for the coating, in particular, of large-area substrates by means of cathode sputtering, the coater having a coating chamber and, provided therein, a cathode assembly (2) where the material to be sputtered is located on a target (4) with a curved surface, the material to be sputtered being located, in particular, on the lateral surface of a cylinder, there being in a single coating chamber for a coherent coating zone at least three, preferably more, cathode assemblies (2) with rotatable, curved targets (4) positioned one beside the other.