Rotatable Main Optical System for Uniform Laser Crystallization
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Solution Overview
Problem
Existing crystallization methods for polycrystalline silicon in active matrix organic light emitting display apparatuses face challenges such as high temperature requirements, non-uniformity, contamination, and formation of strains or non-crystallization areas due to limitations in methods like SPC, ELC, and MIC, particularly with the SLS method where strains and non-crystallization areas can occur.
Innovation Solution
A crystallization apparatus utilizing a sequential lateral solidification (SLS) method with a rotatable main optical system and telescope lens modules to ensure uniform laser irradiation and prevent strains, allowing the crystallization region to be fully contained within the laser irradiation area by adjusting the optical system's angle relative to the laser generating device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the main optical system is fixed relative to the laser generating device, then the device structure is simple, but strains and non-crystallization areas form during crystallization
Solution Approach 1:
The main optical system is made rotatable relative to the laser generating device, allowing dynamic adjustment of the optical path angle. This enables the laser beam to irradiate the substrate at optimized angles that prevent strain formation and non-crystallization areas, while maintaining a relatively simple overall device structure through a single degree of freedom rotation mechanism.
2Manufacturing precision
If the laser beam is irradiated without optical uniformization, then the optical system is simple, but non-uniform crystallization occurs
Solution Approach 1:
A beam uniformizer is introduced as an intermediary component between the laser generating device and the substrate. This device modifies the laser beam profile to achieve uniform intensity distribution across the irradiation area, ensuring uniform crystallization without requiring complex multi-element optical systems or multiple irradiation passes.
3Area of stationary object
If the laser beam divergent angle is not minimized, then the optical system is simple, but the crystallization region cannot be fully contained
Solution Approach 1:
Multiple optical functions (beam divergence minimization, uniformization, and amplification) are merged into a integrated optical system comprising telescope lens modules and a beam uniformizer. This consolidated approach achieves full containment of the crystallization region within the laser irradiation area while avoiding the need for separate, complex optical components for each function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively prevents the formation of strains and non-crystallization areas during the crystallization process, ensuring uniform crystallization and maintaining high-quality thin film transistor characteristics, thereby enhancing the productivity and reliability of the organic light emitting display apparatuses.
Implementation Method 1
a laser generating device for emitting a laser beam
Implementation Method 2
a main optical system formed at one side of the second telescope lens module for uniformizing and amplifying a laser beam transmitted through the second telescope lens module
Implementation Method 3
the main optical system is rotatable with respect to the laser generating device
Implementation Method 4
a crystallization apparatus that performs crystallization on a substrate using a sequential lateral solidification (SLS) method
Data Source
AI summary
A crystallization apparatus that performs crystallization on a substrate using sequential lateral solidification (SLS) includes a laser generating device for emitting a laser beam, a first telescope lens module and a second telescope lens module at one side of the laser generating device for minimizing a divergent angle of a laser beam emitted by the laser generating device; and a main optical system at one side of the second telescope lens module for uniformizing and amplifying a laser beam transmitted through the second telescope lens module. The main optical system is rotatably formed with respect to the laser generating device.