Rotatable Partition Walls for Vacuum Deposition Atmosphere Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing vacuum deposition apparatuses face challenges in separating the atmosphere between the deposition chamber and the adjacent chamber, leading to contamination and reduced deposition efficiency due to the diffusion of particles through large-area discharge openings.
Innovation Solution
The apparatus incorporates rotatable second partition walls that cover the outer cylinder parts of the can-roller, creating a controlled conductance between the deposition chamber and the adjacent chamber, and a movable deposition unit with a lid body having a discharge opening that can be positioned to minimize particle spread, ensuring effective separation of atmospheres.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If large-area discharge openings are provided in the deposition unit, then the film-forming rate is increased, but the particles spread and diffuse inside the deposition chamber, contaminating the chamber and lowering deposition efficiency
Solution Approach 1:
The deposition chamber is divided into a deposition chamber proper and an adjacent chamber by partition walls. The partition walls include through-holes that allow controlled particle passage while preventing widespread diffusion. This segmentation contains particle spread within specific regions while maintaining separation between functional zones.
Solution Approach 2:
Partition walls with controlled through-holes act as intermediary structures between the deposition chamber and adjacent chamber. These partition walls mediate particle flow by allowing necessary particles to pass through the through-holes while blocking random diffusion and contamination pathways.
2Object-affected harmful factors
If the deposition chamber and adjacent chamber are well-separated, then contamination is prevented, but the conductance value increases allowing particles to wrap around to the adjacent chamber
Solution Approach 1:
The partition walls have different properties in different regions: the through-holes provide localized controlled passage for particles, while the solid portions provide atmospheric separation. This local differentiation allows simultaneous achievement of containment and controlled conductance.
3Object-affected harmful factors
If clearances between partition plate and can-roller are reduced to improve sealing, then atmospheric separation is improved, but the sheet-like base material cannot pass through the clearance
Solution Approach 1:
The clearance space is segmented into functional zones: a base material passage zone for transportation and a sealing zone for atmospheric separation. The partition plate structure is designed to provide both functions by creating distinct pathways and sealing regions.
Solution Approach 2:
The solution moves from a single-dimensional clearance problem to a multi-dimensional arrangement where the partition plate creates vertical and horizontal differentiation between base material passage and sealing functions, allowing both transportation and atmospheric separation to coexist.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for a high film-forming rate while preventing particle diffusion to the adjacent chamber, reducing contamination and waste, and enabling precise control over the deposition process, ensuring uniform film thickness and efficient material use.
Implementation Method 1
The deposition material contained in the crucible is thus caused to be sublimated or evaporated by heating
Implementation Method 2
The deposition material contained in the crucible is thus caused to be sublimated or evaporated by heating
Implementation Method 3
the sublimated or evaporated deposition particles are made to get adhered and accumulated for deposition (film formation) on such a part of the sheet-like base material as is wound around the can-roller
Implementation Method 4
a main chamber... the main chamber being capable of forming therein a vacuum atmosphere
Data Source
AI summary
Inside a main chamber there are provided: first partition walls partitioning a deposition chamber having a deposition unit; and second partition walls disposed in continuation to the first partition walls so as to cover outer cylinder parts of a can-roller while leaving a first gap that curves at a curvature coinciding with an outer peripheral surface of the can-roller. The deposition chamber and an adjacent chamber are in communication with each other with the first gap such that a conductance between the deposition chamber and the adjacent chamber is determined by the second partition walls. At least one of the second partition walls is arranged to be rotatable, with a rotary shaft of the can-roller, between a shielding position which shields such a part of the can-roller as is lying opposite to the deposition unit, and a withdrawn position which is circumferentially away from the deposition unit.