Rotatable Dual-Substrate Transfer Robot for Mixed Process Modules
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Solution Overview
Problem
Current substrate processing systems are inefficient as they require separate systems for single and dual process modules, leading to increased transfer time and exposure of substrates to the atmosphere, compromising quality and output.
Innovation Solution
A transfer robot and substrate processing system that integrates both single and dual process modules within a unified system, allowing for simultaneous transfer of one or two substrates using rotatable seating units and a three-dimensional movement mechanism, minimizing interference and optimizing substrate handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If separate substrate processing systems are constructed for single process module and dual process module, then each system can be optimized for its specific module type, but the substrate must be exposed to the atmosphere during transfer between systems and transfer time increases
Solution Approach 1:
The transfer robot integrates both single substrate transfer capability and dual substrate transfer capability into one unified system. The end effector can selectively hold one substrate or two substrates simultaneously, eliminating the need for separate processing systems and enabling continuous operation without atmospheric exposure.
Solution Approach 2:
The transfer robot is designed with universal functionality to handle both single process modules and dual process modules. The end effector can adapt its configuration to transfer either one substrate or two substrates, making the system versatile and eliminating the need for separate specialized systems.
2Adaptability or versatility
If separate substrate processing systems are constructed for single process module and dual process module, then each system can be optimized for its specific module type, but substrate quality deteriorates due to atmospheric exposure during transfer
Solution Approach 1:
The transfer robot merges single and dual substrate transfer capabilities into one system, allowing substrates to remain in the vacuum environment throughout the transfer process regardless of whether one or two substrates are being transferred, thus preventing atmospheric contamination and quality deterioration.
Solution Approach 2:
The transfer robot acts as an intermediary that enables seamless transfer between single and dual process modules within the same vacuum environment, eliminating the need for substrates to exit the vacuum chamber and thereby preventing atmospheric exposure and quality degradation.
3Productivity
If two end effectors are provided side by side for dual process module, then two substrates can be transferred simultaneously, but the system cannot transfer substrate to single process module
Solution Approach 1:
The end effector is designed with dynamic configurability, allowing it to change its substrate-holding configuration based on the process module type. It can selectively engage one substrate or two substrates, enabling the system to adapt between single and dual process modules while maintaining high transfer efficiency.
Solution Approach 2:
The end effector's operational parameters are changed based on the process module type. The robot can adjust its gripping configuration and transfer mode to match whether a single or dual process module is being served, thereby maintaining both high productivity and versatility.
4Adaptability or versatility
If a transfer robot is designed for single process module transferring one substrate at a time, then it can work with single process module, but efficiency of dual process module becomes very low
Solution Approach 1:
The transfer robot employs dynamic substrate-holding capability, allowing the end effector to adaptively hold one or two substrates based on the process module requirements. This enables the robot to maintain compatibility with single process modules while maximizing efficiency when working with dual process modules by transferring two substrates simultaneously.
Solution Approach 2:
The robot's operational parameters are dynamically changed based on the process module type. When working with dual process modules, the end effector is configured to hold and transfer two substrates simultaneously, thereby maximizing transfer efficiency while maintaining compatibility with single process modules when needed.
Data Source
AI summary
The present invention disclosed herein relates to a transfer robot and a substrate processing apparatus having the same, and more particularly, to a transfer robot for transferring a substrate through a transfer module and a substrate processing apparatus having the same. The substrate processing system according to the present invention includes: a transfer module (300) provided with a transfer robot (500) configured to transfer substrates (10); one or more dual process modules (100) each of which is installed at one side of the transfer module (300) so that two substrates (10) are accessible at the same time and on which a pair of substrate support units (13) configured to respectively seat the two substrates (10) thereon are disposed horizontally; and one or more single process modules (200) each of which is installed at one side of the transfer module (300) so that one substrate (10) is accessible and on which one or more substrate support units (13) configured to seat the substrates (10) thereon are provided. The transfer robot (500) includes a first substrate seating unit (510a) and a second substrate seating unit (510b), each of which has a seating surface (11), on which the substrate (10) is seated, and which are disposed on the same first plane, and at least one of the first substrate seating unit (510a) or the second substrate seating unit (510b) is installed to be rotatable about a vertical rotation axis (C1) so as to be disposed in a region in which the at least one of the first substrate seating unit (510a) or the second substrate seating unit (510b) does not interfere with the substrate transfer when the substrates (10) are transferred.