Rotatable Locating Apparatus for Semiconductor Wafer Retrieval
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Solution Overview
Problem
The increased density and size of semiconductor devices and light emitting diode wafers require precise and efficient retrieval methods to avoid damage and cost, as manual retrieval is time-consuming and risky, and existing mechanical arms with limited flexibility face design and configuration challenges for arc surface locating.
Innovation Solution
A rotatable locating apparatus with a fixing base, rotatable rack, carrier, and dual driving modules allows for precise movement of accommodating slots along two axes, enabling the carrier to maintain a fixed position relation with a working platform, simplifying wafer retrieval by rotating the rack and carrier along specific axes to align slots with the platform.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If a mechanical arm with high degrees of freedom is used for automatic wafer retrieval, then the flexibility and automation capability are improved, but the device complexity and design difficulty increase significantly
Solution Approach 1:
The apparatus is divided into multiple independent rotating modules: a first rotating module for rotating the carrier body, and a second rotating module for rotating the clamping mechanism. This segmentation allows each module to perform a specific function with simple structure, avoiding the need for a complex multi-degree-of-freedom mechanical arm while achieving automated wafer retrieval
Solution Approach 2:
The rotating carrier body serves multiple functions: it holds multiple wafers in accommodating slots, rotates to position different wafers for retrieval, and integrates the clamping mechanism rotation. This multi-functionality replaces what would otherwise require separate mechanical components, reducing overall system complexity
2Device complexity
If manual retrieval method is used, then the device complexity is reduced, but the retrieval time increases and the risk of wafer damage increases
Solution Approach 1:
The apparatus enables automated self-service retrieval through programmable rotation control. The first rotating module rotates the carrier to position the required accommodating slot, and the second rotating module positions the clamping mechanism, all without manual intervention. This automation improves retrieval efficiency while the simple rotational mechanism keeps device complexity low
Solution Approach 2:
Multiple wafers are pre-loaded into accommodating slots on the carrier body before the retrieval process begins. This preliminary arrangement allows rapid sequential retrieval by simply rotating the carrier to different positions, eliminating the need for complex real-time manipulation and improving productivity
3Device complexity
If the carrier rotates along the first rotation axis only, then the structure is simplified, but the positioning precision for arc surface locating is insufficient
Solution Approach 1:
The system transitions from single-axis rotation to two-axis rotation: the first rotation axis rotates the entire carrier body, while the second rotation axis rotates the clamping mechanism independently. This dimensional addition enables precise positioning on the arc surface by controlling both rotation angles, achieving high manufacturing precision without excessive structural complexity
Solution Approach 2:
The carrier body is designed with an arc surface that matches the curvature of the wafer or sample. By rotating the carrier along the first rotation axis and the clamping mechanism along the second rotation axis, the system can accurately locate and retrieve wafers from curved surfaces, improving positioning precision for arc surface applications
Data Source
AI summary
A rotatable locating apparatus including a fixing base, a rotatable rack, a first driving module, a carrier, and a second driving module is provided. The rotatable rack is pivoted on the fixing base through a first rotation axis. The first driving module is coupled to the rotatable rack to drive the rotatable rack rotating with respect to the fixing base along the first rotation axis. The carrier is provided with accommodating slots on an arc surface of the carrier, and the carrier is pivoted on the rotatable rack through a second rotation axis. The second rotation axis passes through a curvature center of the arc surface and is perpendicular to the first rotation axis. The curvature center is located on the first rotation axis. The second driving module is coupled to the carrier to drive the carrier rotating with respect to the rotatable rack along the second rotation axis.