Rotated Grid 3D NAND Memory for High Density and Low Power

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Solution Overview

Problem

Three-dimensional (3D) memory structures face challenges in increasing bit density while minimizing the negative impacts on power consumption and operation speed due to the need for deep holes and increased number of string select lines, which lead to higher unit cell capacitance and read/write disturbances.

Innovation Solution

A memory device with a multilevel stack of conductive layers and pillars arranged on a rotated grid, allowing for a higher density of bit lines and reduced string select lines, which enables increased parallel operation, lower power consumption, and improved data rates by reducing unit cell capacitance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the number of string select lines is increased to achieve higher bit density, then storage capacity is improved, but unit cell capacitance increases and read/write disturbances occur

Engineering Contradiction:
Improvebit densityVSAvoidpower consumption
Core Design Contradiction:
Quantity of substanceVSUse of energy by moving object

Solution Approach 1:

The patent transitions from a planar 2D memory architecture to a three-dimensional vertical channel structure with gate-all-around cells. This dimensional change allows bit lines to be positioned above the memory plane, enabling higher bit density without proportionally increasing the number of string select lines, thus reducing unit cell capacitance and power consumption while maintaining storage capacity

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Quantity of substance

If the number of string select lines is increased to achieve higher bit density, then storage capacity is improved, but read/write disturbances increase

Engineering Contradiction:
Improvebit densityVSAvoidread disturbance
Core Design Contradiction:
Quantity of substanceVSObject-affected harmful factors

Solution Approach 1:

By moving bit lines to a higher dimension (above the memory plane) in the vertical channel structure, the patent achieves higher bit density without increasing string select line count, thereby reducing capacitive coupling and read disturbances that would otherwise occur with additional select lines

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Quantity of substance

If deep holes are created to increase storage capacity, then bit density is improved, but manufacturing complexity and power consumption increase

Engineering Contradiction:
Improvestorage capacityVSAvoidmanufacturing complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The vertical channel structure with gate-all-around cells repositions bit lines above the memory plane, achieving high storage capacity without requiring excessively deep hole etching. This dimensional reconfiguration reduces manufacturing complexity while maintaining improved bit density

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS9666532B2Twisted array design for high speed vertical channel 3D NAND memory
Publication Date: 2017.05.30 MACRONIX INTERNATIONAL CO LTD
  • US9666532B2 patent drawing
  • US9666532B2 patent drawing
  • US9666532B2 patent drawing

AI summary

Roughly described, a memory device has a multilevel stack of conductive layers. Vertically oriented pillars each include series-connected memory cells at cross-points between the pillars and the conductive layers. SSLs run above the conductive layers, each intersection of a pillar and an SSL defining a respective select gate of the pillar. Bit lines run above the SSLs. The pillars are arranged on a regular grid which is rotated relative to the bit lines. The grid may have a square, rectangle or diamond-shaped unit cell, and may be rotated relative to the bit lines by an angle θ where tan(θ)=±X/Y, where X and Y are co-prime integers. The SSLs may be made wide enough so as to intersect two pillars on one side of the unit cell, or all pillars of the cell, or sufficiently wide as to intersect pillars in two or more non-adjacent cells.