Rotating Beam Processing Alignment Using Real-Time Object Measurement

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Solution Overview

Problem

Existing processing systems for objects using energy beams face challenges in accurately processing objects due to misalignment and positional errors, leading to inefficiencies and suboptimal results.

Innovation Solution

A processing system that includes a holding apparatus, a rotation apparatus, a beam irradiation apparatus, and a control apparatus, which measures the object and adjusts the beam irradiation and rotation based on real-time measurements to ensure precise alignment and positioning of the energy beam.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the object is held and rotated during beam irradiation, then processing efficiency and uniformity are improved, but misalignment between the object and beam axis occurs leading to reduced processing precision

Engineering Contradiction:
Improveprocessing efficiencyVSAvoidbeam-object alignment precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent implements a feedback mechanism where the object measurement apparatus continuously measures the object's position and orientation during rotation, and the control apparatus adjusts the beam irradiation apparatus or rotation apparatus based on measured deviations from the desired alignment, thereby maintaining processing precision while enabling continuous rotation for improved productivity

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent replaces mechanical alignment methods with optical measurement and control systems. The object measurement apparatus uses optical fields to detect object position and orientation, and the control apparatus uses computational algorithms to calculate and execute corrections, substituting complex mechanical adjustment mechanisms with a more precise and automated measurement-control system

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If measurement apparatus is added to measure object and beam, then processing precision is improved, but device complexity increases

Engineering Contradiction:
Improveprocessing accuracyVSAvoidsystem complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent designs the measurement apparatus to serve multiple functions: measuring object position, orientation, and shape, as well as measuring beam position and orientation. The control apparatus also performs multiple roles including calculating misalignment, determining correction amounts, and controlling both the beam irradiation apparatus and rotation apparatus. This multi-functionality reduces the need for separate dedicated components for each measurement and control task, thereby managing system complexity while achieving high processing precision

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This system enables precise and efficient processing of objects by correcting misalignments and positional errors, resulting in improved processing accuracy and quality.

Implementation Method 1

a beam irradiation apparatus that is configured to irradiate the object held by the holding apparatus with an energy beam

Methodology Applied
Scientific EffectEnergy beam irradiation: Laser

Data Source

PatentUS20230166359A1Processing system
Publication Date: 2023.06.01 NIKON CORP
  • US20230166359A1 patent drawing
  • US20230166359A1 patent drawing
  • US20230166359A1 patent drawing

AI summary

A processing system includes a holding apparatus for hold an object to be rotatable; a rotation apparatus for rotating the holding apparatus; a beam irradiation apparatus for irradiating the object with an energy beam; an object measurement apparatus for measuring the object; and a control apparatus for controlling at least one of the beam irradiation apparatus and the rotation apparatus based on an information related to the object measured by the object measurement apparatus and an information of a rotational axis of the rotation apparatus, and processes the object by irradiating the object held by the holding apparatus with the energy beam from the beam irradiation apparatus.