Rotating Blade Contamination Prevention for Lithography
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Lithographic projection systems face challenges in preventing debris and heat-related issues with contamination prevention systems, which can lead to malfunctions and increased sensitivity to vibrations and unbalances due to high heat loads and debris particles from EUV radiation sources.
Innovation Solution
A contamination prevention system with a rotatable carrier and radially extending blades is used to absorb or deflect debris, integrated with a stationary shaft and bearing for rotation, minimizing unbalances and vibrations, and incorporating fluid bearings for temperature control and stabilization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a contamination prevention system is used to block debris from EUV radiation sources, then debris propagation is prevented, but heat loads increase causing sensitivity to vibrations and unbalances
Solution Approach 1:
The contamination prevention system employs a rotatable carrier with blades that rotate around a stationary shaft. This dynamic configuration allows the system to continuously clear debris while distributing heat loads through rotational motion, preventing localized overheating and reducing sensitivity to vibrations and unbalances.
Solution Approach 2:
Fluid bearings are used to support the rotatable carrier, enabling smooth rotation while managing heat through fluid lubrication and cooling. The fluid bearing system dissipates heat generated by friction and mechanical stress, maintaining operational stability despite high heat loads from blocking EUV radiation debris.
2Object-affected harmful factors
If the contamination prevention system rotates blades to deflect debris, then debris propagation is reduced, but unbalances and vibrations increase
Solution Approach 1:
The system incorporates a stationary shaft that provides a stable, balanced support for the rotatable carrier. By anchoring the rotation axis and using fluid bearings to maintain precise rotational alignment, the system counteracts unbalances and vibrations generated during blade rotation, ensuring stable operation while effectively deflecting debris.
3Temperature
If fluid bearings are used for temperature control, then heat loads are managed, but device complexity increases
Solution Approach 1:
Fluid bearings provide an integrated solution for both rotational support and thermal management. The fluid medium simultaneously lubricates the bearing surfaces to reduce friction and dissipates heat through convection and conduction, eliminating the need for separate cooling mechanisms and reducing overall device complexity despite the advanced bearing technology.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively mitigates debris propagation and manages heat loads, enhancing the stability and performance of the contamination prevention system by rotating blades and using fluid bearings for temperature management, reducing the risk of malfunctions and crashes.
Implementation Method 1
The blades are constructed and arranged to absorb or deflect the material
Implementation Method 2
incorporating fluid bearings for temperature control and stabilization
Data Source
AI summary
A contamination prevention system is constructed and arranged to prevent material from propagating with radiation into a lithographic apparatus. The contamination prevention system includes a rotatable carrier provided with a plurality of generally radially outwardly extending blades. The blades are constructed and arranged to absorb or deflect the material. The system also includes a stationary shaft, and a bearing constructed and arranged to rotate the rotatable carrier and the blades around the shaft. The rotatable carrier is provided with a space for at least partially receiving a portion of the shaft.