Rotating Carrier Storage Tables for Precise Overhead Transfer Alignment
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Solution Overview
Problem
Existing substrate transfer systems in semiconductor manufacturing face inefficiencies in space utilization and stability during carrier handling, particularly in semiconductor production lines, where carriers are transferred and stored using overhead hoist transport systems.
Innovation Solution
A storage apparatus with a rotating plate system and multiple tables fixed to a ceiling, allowing carriers to be stored and transferred efficiently while maintaining horizontal alignment, and incorporating a gas supply system to remove contaminants.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional storage structure with fixed tables is used, then the structure is simple and stable, but the carrier cannot be precisely aligned horizontally during loading and unloading, leading to potential substrate damage
Solution Approach 1:
The patent applies the dynamics principle by introducing a rotating plate mechanism that allows the storage apparatus to dynamically adjust its orientation. The rotating plate can rotate about a vertical axis, enabling precise horizontal alignment of carriers during loading and unloading operations while maintaining structural stability. This dynamic adjustment capability resolves the contradiction between alignment precision and structural simplicity.
2Adaptability or versatility
If the storage apparatus is fixed to the ceiling, then space utilization is optimized, but the apparatus cannot be repositioned or adjusted, reducing operational flexibility
Solution Approach 1:
The rotating plate mechanism provides operational flexibility by allowing the storage apparatus to reposition itself horizontally through rotation, while the ceiling-mounted fixed structure optimizes space utilization. The dynamic rotation capability enables the apparatus to access different positions along the transfer rail without requiring additional ceiling space or complex repositioning mechanisms.
3Quantity of substance
If multiple tables are spaced apart on the rotating plate, then carrier storage capacity is increased, but maintaining horizontal parallelism of all tables during rotation becomes difficult
Solution Approach 1:
The rotating plate design allows multiple tables to be arranged at different radial positions while maintaining their horizontal parallelism through synchronized rotation. All tables rotate together as a unified structure, ensuring that their top surfaces remain parallel to the horizontal plane throughout the rotation process, thus maintaining both storage capacity and alignment precision.
4Measurement precision
If a transfer apparatus with tag sensor is used, then positioning precision is improved, but the system complexity and cost increase
Solution Approach 1:
The patent replaces complex mechanical positioning systems with an optical/electronic tag sensor system. The tag sensor detects the position of carriers or storage apparatus through electromagnetic fields or optical signals, providing precise positioning information without requiring complex mechanical linkages, guides, or physical measurement devices, thus reducing mechanical complexity while improving positioning precision.
Data Source
AI summary
A storage apparatus includes a support part fixedly coupled to a ceiling surface, a rotating plate under the support part, a driving unit connecting the support part and the rotating plate, and a plurality of tables spaced apart from each other. The plurality of tables has an axis. The plurality of tables is connected to the rotating plate. The rotating plate is rotatable about a rotation axis parallel to the axis.