Rotating Chuck Diffraction Imaging for Transparent Thin Films
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Solution Overview
Problem
Visible light interferometers have low absorption rates for transparent thin films, leading to overlapping images of surface and internal structures in 3D samples, hindering precise analysis.
Innovation Solution
An analysis apparatus with a rotating chuck, light sources, sensors, and a processor that reconstructs data using diffraction patterns generated by light scattering, allowing for high-resolution imaging of 3D structures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If visible light is used for interferometric analysis, then the analysis can be performed with conventional equipment, but the absorption rate for transparent thin films is low resulting in overlapping images
Solution Approach 1:
The patent changes the fundamental parameter of light wavelength from visible light to X-rays, which have different interaction properties with transparent thin films. This parameter change enables high absorption rates for the thin films while maintaining measurement precision through diffraction-based analysis rather than traditional interferometry
Solution Approach 2:
The patent replaces the mechanical interferometric measurement system with a diffraction-based analysis system. Instead of using interferometers that rely on wave interference patterns, the invention uses X-ray diffraction patterns generated by scattering from the sample structure, fundamentally changing the measurement mechanism
2Measurement precision
If diffraction patterns are collected at multiple rotation angles, then measurement precision is improved, but the measurement time increases
Solution Approach 1:
The patent employs periodic rotation of the sample stage to collect diffraction patterns at multiple angular positions. This periodic action enables comprehensive data collection for accurate 3D reconstruction while maintaining efficient measurement through systematic angular sampling
Solution Approach 2:
The patent performs preliminary data processing and reconstruction algorithms on the collected diffraction patterns to efficiently extract structural information. By preprocessing the diffraction data and applying reconstruction techniques, the system achieves high measurement precision without requiring excessively long measurement times
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise measurement and imaging of physical, electrical, and chemical characteristics of samples with improved measurement range and resolution, detecting fine defects effectively.
Implementation Method 1
the diffraction patterns being generated based on scattering of the light irradiated onto the first region of the substrate
Implementation Method 2
one or more sensors configured to sense diffraction patterns respectively corresponding to a plurality of rotation angles
Data Source
AI summary
Systems, devices, and operation methods for an analysis apparatus are provided. In one aspect, an analysis apparatus includes a stage having a rotating chuck configured to rotate around an axis of rotation, one or more light sources configured to irradiate light onto a first region of a substrate disposed on the stage, one or more sensors configured to sense diffraction patterns that respectively correspond to a plurality of rotation angles from a rotation of the rotating chuck, and a processor configured to reconstruct data of the first region using the diffraction patterns respectively corresponding to the plurality of rotation angles, where the diffraction pattern is based on scattering of the light irradiated onto the first region.