Rotating Chuck Pin Assembly for Substrate Wear Distribution
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Chuck pins used in semiconductor manufacturing processes are prone to wear due to repeated contact with substrates, leading to reduced lifespan and difficulty in maintaining effective substrate grip.
Innovation Solution
A chuck pin assembly with a rotatable grip member that distributes stress evenly across multiple contact points, coupled via a rotational connection member to a body member, allowing for rectilinear movement and preventing concentration of wear on specific areas.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If chuck pins are used to grip the substrate by contact with lateral surface, then substrate holding is achieved, but wear occurs on the chuck pins due to repeated contact
Solution Approach 1:
The grip member is designed to rotate about the second rotating center shaft, transforming the static contact point into a dynamic contact pattern. As the grip member rotates, different portions of its contact surface sequentially engage with the substrate, distributing wear across the entire contact perimeter rather than concentrating it at a single point. This dynamic mechanism maintains reliable substrate gripping while significantly extending chuck pin lifespan.
2Productivity
If repeated substrate processing is performed, then productivity is improved, but wear concentration occurs on specific areas of the chuck pin
Solution Approach 1:
The rotational mechanism of the grip member converts repeated processing cycles into beneficial wear distribution. Each rotation cycle during substrate processing naturally redistributes the contact stress across different areas of the grip member's contact surface, preventing wear concentration even during high-volume production.
Solution Approach 2:
The periodic rotation of the grip member during each processing cycle creates a rhythmic redistribution of contact forces. This periodic action ensures that no single area bears the brunt of continuous processing, allowing high productivity to be maintained without localized wear degradation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution extends the lifespan of chuck pins by reducing wear and preventing substrate separation during processing, enhancing the reliability of substrate handling.
Implementation Method 1
a rotational connection member rotatably coupling the grip member with respect to the body member
Data Source
AI summary
A chuck pin assembly includes a body member provided on a circumferential portion of a chuck supporting a substrate and configured to be movable with respect to the chuck, a grip member gripping a lateral portion of the substrate, and a rotational connection member rotatably coupling the grip member to the body member. As the grip member is rotatable, it is possible to prevent the chuck pin from being worn at a specific portion which contacts the substrate, and to improve the life of the chuck pin.