Rotating Electrostatic Chuck Slip-Ring Power for High-Current Heating
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Solution Overview
Problem
Existing semiconductor processing tools face challenges in powering high current components, such as heating elements, within rotating pedestals due to limitations in capacitive coupling and bearing-based power transmission, which are not suitable for high current applications.
Innovation Solution
The implementation of a slip-ring architecture that allows for the transmission of high currents between stationary and rotating components, enabling the integration of heating elements and other powered components within the rotating pedestal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If capacitive coupling is used to power the biasing electrode, then the biasing electrode can rotate freely with the pedestal, but this method is not suitable for high current applications
Solution Approach 1:
A slip ring assembly acts as an intermediary component between stationary and rotating parts, enabling continuous electrical contact for high current transmission while maintaining rotational freedom. The slip ring includes conductive rings that rotate with the pedestal and stationary contacts that remain fixed, with electrical contact maintained through controlled sliding friction.
2Power
If current passes through the bearing assembly to power the chucking electrode, then power can be transmitted to rotating components, but this approach has limitations for high current components like heating elements
Solution Approach 1:
The power transmission system is segmented into separate functional paths: low current signals through capacitive coupling and high current power through slip rings. This segmentation allows each pathway to be optimized for its specific current requirements, with slip rings dedicated to high current components like heating elements and chucking electrodes.
3Power
If a slip-ring architecture is implemented, then high currents can be transmitted to rotating components, but the complexity of maintaining electrical connections across rotating junctions increases
Solution Approach 1:
Multiple electrical connection functions are merged into a single integrated slip ring assembly. The assembly simultaneously handles power transmission to the chucking electrode, biasing electrode, and heating element through multiple concentric conductive rings, reducing the number of separate connection mechanisms needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the effective power supply to high current components within the rotating pedestal, maintaining electrical connections across the junction between stationary and rotating components, enhancing the operational capabilities of semiconductor processing tools, especially in ultra-low vacuum chambers.
Implementation Method 1
a slip-ring architecture that allows for the transmission of high currents between stationary and rotating components
Implementation Method 2
the rotating pedestal can comprise a electrostatic chucking electrode
Implementation Method 3
a heating element is within the pedestal
Data Source
AI summary
Embodiments disclosed herein include an electrostatic chuck. In an embodiment, the electrostatic chuck comprises a pedestal with a support surface for supporting a substrate and a second surface opposite from the support surface, and chucking electrode within the pedestal. In an embodiment, a biasing electrode is within the pedestal, and a heating element is within the pedestal. In an embodiment, the electrostatic chuck further comprises a shaft coupled to the second surface of the pedestal, and a rotation assembly coupled to the shaft to rotate the shaft and the pedestal.