Rotating Cup Drive for Stable Substrate Droplet Collection
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in suppressing bouncing liquid droplets that cause watermarks and contamination, while adding a dedicated rotating mechanism for the splash guard increases cost and complexity, making stable processing difficult.
Innovation Solution
A substrate processing apparatus that rotates both the substrate holder and a surrounding rotating cup using a shared rotational driving force, eliminating the need for a separate mechanism to control the splash guard's rotation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a dedicated rotating mechanism for the splash guard is added to rotate it together with the substrate, then bouncing liquid droplets are suppressed, but apparatus cost increases and device complexity increases
Solution Approach 1:
The patent merges the rotation function of the splash guard with the substrate holder rotation mechanism. The splash guard is configured to rotate together with the substrate holder, eliminating the need for a separate dedicated rotating mechanism. This integration reduces device complexity and apparatus cost while still achieving the effect of suppressing bouncing liquid droplets through synchronized rotation.
Solution Approach 2:
The substrate holder rotation mechanism is given a dual function: it simultaneously rotates both the substrate holder and the splash guard. This multi-functionality approach allows one mechanism to perform multiple tasks, reducing the overall number of components and simplifying the apparatus structure while maintaining the ability to suppress bouncing liquid droplets.
2Object-affected harmful factors
If a dedicated rotating mechanism for the splash guard is added, then bouncing liquid droplets are suppressed, but apparatus cost increases
Solution Approach 1:
The patent merges the rotation function of the splash guard with the substrate holder rotation mechanism. The splash guard is configured to rotate together with the substrate holder, eliminating the need for a separate dedicated rotating mechanism. This integration reduces device complexity and apparatus cost while still achieving the effect of suppressing bouncing liquid droplets through synchronized rotation.
Solution Approach 2:
The substrate holder rotation mechanism is given a dual function: it simultaneously rotates both the substrate holder and the splash guard. This multi-functionality approach allows one mechanism to perform multiple tasks, reducing the overall number of components and simplifying the apparatus structure while maintaining the ability to suppress bouncing liquid droplets.
3Object-affected harmful factors
If a dedicated rotating mechanism for the splash guard is added with simultaneous control requirements, then bouncing liquid droplets are suppressed, but processing stability becomes difficult to maintain
Solution Approach 1:
The patent merges the rotation function of the splash guard with the substrate holder rotation mechanism. The splash guard is configured to rotate together with the substrate holder, eliminating the need for a separate dedicated rotating mechanism. This integration reduces device complexity and apparatus cost while still achieving the effect of suppressing bouncing liquid droplets through synchronized rotation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for stable and cost-effective substrate processing by reducing bouncing liquid droplets, preventing contamination, and maintaining processing stability.
Implementation Method 1
a substrate holder configured to suck and hold a central part of a lower surface of a substrate and provided rotatably about an axis of rotation extending in a vertical direction
Implementation Method 2
when the liquid droplets are collected by the splash guard, the liquid droplets collide with the inner peripheral surface of the splash guard
Implementation Method 3
the rotating mechanism includes a power transmitter configured to transmit a part of the rotational driving force as a cup driving force to the rotating cup
Data Source
AI summary
This invention includes a substrate holder provided rotatably about an axis of rotation extending in a vertical direction while sucking and holding a central part of a lower surface of a substrate, a rotating mechanism for outputting a rotational driving force for rotating the substrate holder, a processing mechanism for processing the substrate by supplying a processing liquid to the substrate held by the substrate holder, and a rotating cup provided rotatably about the axis of rotation while surrounding an outer periphery of the rotating substrate and configured to collect liquid droplets of the processing liquid scattered from the substrate. The rotating mechanism includes a power transmitter for transmitting a part of the rotational driving force as a cup driving force to the rotating cup, and simultaneously rotates the substrate holder and the rotating cup by the rotational driving force.