Rotating Detector Cavity for Particle Beam Characterization
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Solution Overview
Problem
Conventional ion implantation systems lack the capability to measure beam characteristics beyond ion dose, such as angle and uniformity, which are crucial for precise control and uniformity in semiconductor device manufacturing.
Innovation Solution
An apparatus and method for detecting particle beam characteristics, featuring a body with a cavity and entrance aperture, along with detectors that can rotate and adjust to measure beam characteristics, including angle distribution and intensity, by aligning with or misaligning with the beam path to collect and detect particles effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional Faraday cup is used to measure ion dose, then ion dose measurement is achieved, but beam characteristics such as angle and uniformity cannot be measured
Solution Approach 1:
The detection system is segmented into multiple detectors positioned at different locations and orientations within the cavity. Each detector measures specific beam characteristics (angle, uniformity, intensity), and the combined data provides comprehensive beam characterization beyond just ion dose measurement.
Solution Approach 2:
The detection apparatus is designed as a multi-functional system that can measure multiple beam characteristics (ion dose, angle distribution, uniformity, intensity) using a single integrated setup, eliminating the need for separate measurement devices for each parameter.
2Measurement precision
If detectors are positioned to measure beam angle distribution, then angular characteristics are detected, but measurement system complexity increases
Solution Approach 1:
The problem of measuring angle distribution is solved by transitioning from a single-point measurement to a spatially distributed measurement system. Multiple detectors are positioned at different angular positions around the cavity, converting a complex angular measurement problem into simpler simultaneous point measurements at fixed locations.
3Adaptability or versatility
If the detection system is designed to measure multiple beam parameters, then measurement versatility is improved, but the apparatus becomes more complex
Solution Approach 1:
Multiple measurement functions (ion dose, angle, uniformity, intensity measurement) are merged into a single detection apparatus. The system combines multiple detectors, a cavity structure, and signal processing capabilities into one integrated device that performs comprehensive beam characterization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise measurement and control of beam characteristics, ensuring uniform ion implantation and improved device properties by adjusting the beam to meet specific specifications, enhancing the precision and consistency of semiconductor manufacturing processes.
Implementation Method 1
The Faraday cup body 22 may receive the ions and generates an electrical current representative of the ion dose
Data Source
AI summary
An apparatus and a method for detecting particle beam characteristics are disclosed. In one embodiment, the apparatus may have a body including a first end and second end and at least one detector between the first and second ends. The apparatus may have a transparent state where a portion of the particles entering the apparatus may pass through the apparatus. The apparatus may also have a minimum transparency state where substantially all of the particles entering the apparatus may be prevented from passing through the apparatus and detected. Different transparency state may be achieved by rotating the apparatus or the detector contained therein. With the apparatus, it is possible to detect the beam properties such as the beam intensity, angle, parallelism, and a distribution of the particles in a particle beam.