Rotating Electrode Shaft Ionizer for Semiconductor Particle Control
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Solution Overview
Problem
Ionizer electrodes in semiconductor manufacturing can corrode and generate particles due to corona discharge, leading to contamination and damage in the processing environment, which affects the quality of wafers and reduces productivity.
Innovation Solution
An ionizer design with a rotating and vertically movable electrode shaft that allows for automatic replacement of electrode rows based on predetermined conditions, minimizing downtime and particle contamination, featuring a driver mechanism, controller, and display unit for efficient management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If ionizer electrodes are used for corona discharge to remove static electricity, then static electricity removal efficiency is improved, but electrode corrosion and particle generation occur
Solution Approach 1:
The electrode system is divided into multiple electrode rows (first electrode row, second electrode row, etc.) arranged on the electrode shaft. When one electrode row becomes corroded or generates particles, only that specific row needs to be replaced by rotating the shaft, rather than replacing the entire electrode system. This segmentation allows targeted replacement of degraded components while preserving functional electrode rows.
Solution Approach 2:
The electrode shaft is designed to be rotatable, transforming the static electrode system into a dynamic one. The driver mechanism enables the electrode shaft to rotate between different rotational positions, allowing selective positioning of different electrode rows into the discharge area. This dynamic capability facilitates automated replacement and maintenance of electrode rows based on their operational status.
2Ease of operation
If electrode replacement is performed manually based on subjective judgment, then maintenance flexibility is maintained, but facility shutdown time increases and productivity decreases
Solution Approach 1:
The controller monitors the operational status of electrode rows and automatically determines when replacement is needed based on predetermined conditions (such as discharge time, ion generation efficiency, or detected particle levels). This feedback mechanism eliminates subjective judgment and enables timely, data-driven replacement decisions that optimize both maintenance needs and productivity.
Solution Approach 2:
The system performs electrode row replacement automatically through the driver mechanism and controller without requiring manual intervention. The driver rotates the electrode shaft to position a fresh electrode row in the discharge area when replacement is needed, enabling the system to service itself and minimize facility shutdown time.
3Productivity
If multiple electrode rows are provided on a rotatable shaft, then electrode replacement efficiency is improved, but device complexity increases
Solution Approach 1:
The electrode shaft serves multiple functions: it holds multiple electrode rows, rotates to position different rows in the discharge area, and enables automated replacement. The single shaft structure provides universal support for all electrode rows, eliminating the need for separate mounting mechanisms for each row and reducing overall system complexity despite the multi-functional requirements.
Solution Approach 2:
Multiple electrode rows are merged onto a single rotatable shaft structure rather than being mounted separately. This consolidation allows all electrode rows to be managed through a single rotational mechanism, simplifying the replacement process and reducing the number of independent components needed in the system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The automatic replacement of ionizer electrodes reduces facility shutdowns, enhances productivity, and improves static electricity removal efficiency by minimizing human error and subjective maintenance decisions.
Implementation Method 1
a corona discharge type ionizer generates corona discharge by respectively applying high positive and negative voltages with about ±20 kV to positive and negative needle-type electrodes. Thus, air around the electrodes is ionized into positive and negative ions
Data Source
AI summary
An ionizer includes an electrode shaft, a fixing bar, a driver, and a controller. The electrode shaft includes first and second electrode rows, the first electrode row having a plurality of ionizer electrodes arranged in a first direction and the second electrode row having a plurality of ionizer electrodes arranged in the first direction and spaced apart from the first electrode row. The fixing bar includes a discharge area facing an object to be processed, and accommodates the electrode shaft so a single electrode row is disposed in the discharge area. The driver is inside the fixing bar so as to be coupled to both end portions of the electrode shaft, and controls a position of the electrode shaft. The controller controls the driver to replace the electrode row disposed in the discharge area with another electrode row according to a previously input replacement condition.