Rotating Gas Injector Using a Windmill to Reduce Particle Generation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Batch-type substrate processing apparatuses face challenges in efficiently rotating injectors to control in-plane gas distribution and prevent particle generation during film formation processes, which can lead to uneven processing and contamination risks.
Innovation Solution
A substrate processing apparatus with a longitudinally extending injector, a windmill mechanism, and a driving-gas system that rotates the injector by alternating the supply of driving-gas to control its position and prevent particle generation, using a windmill rotated by inert gas to reduce mechanical components and heat-related issues.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a traditional mechanical rotation mechanism is used for the injector, then the injector can be rotated to control in-plane gas distribution, but the mechanism becomes complex and generates particles that contaminate the substrates
Solution Approach 1:
The patent replaces the traditional mechanical rotation mechanism with a gas-driven windmill system. The windmill has blades that are pushed by gas flow to rotate the injector, eliminating complex mechanical gears, motors, and linkages. This substitution reduces device complexity and minimizes particle generation from mechanical components while maintaining the ability to control in-plane gas distribution through injector rotation.
2Ease of operation
If a mechanical rotation mechanism is used, then the injector can be rotated, but particle generation increases leading to substrate contamination
Solution Approach 1:
The patent eliminates mechanical rotation components that generate particles by using a gas-driven windmill system. The windmill blades are pushed by processing gas or driving gas to rotate the injector, ensuring that no mechanical parts are exposed to the processing environment where they could shed particles onto the substrates.
Solution Approach 2:
The windmill acts as an intermediary between the gas flow and the injector rotation. Instead of directly mechanically rotating the injector, the gas flow first acts on the windmill blades, which then convert the gas flow energy into rotational motion of the injector. This intermediary mechanism prevents direct mechanical contact and particle generation in the processing space.
3Ease of operation
If driving gas is supplied to rotate the windmill, then the injector rotates for gas distribution control, but the driving gas may interfere with the processing gas flow
Solution Approach 1:
The patent supplies driving gas only to the windmill for rotation purposes, rather than using excessive gas flow that would interfere with the processing gas distribution. The driving gas is directed specifically at the windmill blades to generate rotation, while the processing gas continues to flow through the injector to the substrates. This partial action approach ensures that gas is used efficiently for rotation without disrupting the film formation process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for precise control of gas distribution and reduces particle generation, enhancing processing uniformity and preventing contamination, while minimizing mechanical complexity and thermal stress on components.
Implementation Method 1
a first driving-gas supply part configured to supply a driving-gas that rotates the windmill in a first direction; a second driving-gas supply part configured to supply the driving-gas that rotates the windmill in a second direction opposite the first direction
Data Source
AI summary
A substrate processing apparatus including: a processing container; an injector provided inside the processing container to have a shape extending in a longitudinal direction and configured to supply a processing gas; a holder fixed to the injector; a windmill fixed to the holder; a first driving-gas supply part configured to supply a driving-gas that rotates the windmill in a first direction; a second driving-gas supply part configured to supply the driving-gas that rotates the windmill in a second direction opposite the first direction; and a driving-gas controller configured to control the supply of the driving-gas from the first driving-gas supply part and the second driving-gas supply part. The injector is rotated about the longitudinal direction corresponding to a rotational axis by rotating the windmill through the supply of the driving-gas from at least one of the first and second driving-gas supply parts under the control of the driving-gas controller.