Rotating Hash Rail Layout for Faster Overhead Hoist Routing
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Solution Overview
Problem
Existing overhead hoist transport systems in semiconductor fabrication facilities face limitations in changing directions, leading to longer travel times and increased traffic congestion, which affects the efficiency and yield of semiconductor device production.
Innovation Solution
The implementation of a π-shaped hash rail system that allows vehicles to change directions and includes sensors and a separate power supply, enabling efficient route optimization and collision prevention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If traditional fixed rail systems are used for overhead hoist transport, then system simplicity is maintained, but travel time increases and direction-changing capability is limited
Solution Approach 1:
The hash rail is designed to be rotatable about a vertical axis, transforming the fixed rail system into a dynamic one. This allows the rail to change its orientation and direction based on operational needs, enabling vehicles to efficiently change directions without requiring complex switching mechanisms or multiple fixed rail segments. The rotatable design directly addresses the contradiction by providing directional flexibility (improving speed) while maintaining relative system simplicity through a single movable component rather than multiple fixed components.
2Productivity
If traditional fixed rail systems are used, then system complexity is low, but traffic congestion increases due to limited route options
Solution Approach 1:
The rotatable hash rail creates dynamic route options that can be adjusted in real-time based on traffic conditions and destination requirements. This dynamic capability allows multiple vehicles to utilize different paths and timing, reducing congestion and improving overall transfer capacity between bays.
Solution Approach 2:
The system changes the orientation parameter of the hash rail to create different operational modes and routes. By varying the rail's angular position, the system can optimize traffic flow patterns, create alternative pathways during congestion, and adapt to changing production priorities, thereby improving productivity without requiring a completely complex multi-rail infrastructure.
3Reliability
If hash rail with separate power supply is implemented, then collision prevention and safety are improved, but system complexity and cost increase
Solution Approach 1:
The separate power supply for the hash rail acts as an independent intermediary control system. This dedicated power source allows the rail to be controlled and monitored independently from the vehicle power systems, enabling precise coordination of rail movement with vehicle arrivals. The independent power supply facilitates safety interlocks, collision detection, and emergency stop capabilities, improving reliability while keeping the added complexity isolated to a single subsystem rather than affecting the entire system.
Data Source
AI summary
An automated material handling system (AMHS) and a method of operating the AMHS are disclosed. In one aspect, the AMHS includes a network of rails and a vehicle configured to hold a sample carrier that stores one or more samples, wherein the vehicle is configured to move within the FAB via the network of rails. The AMHS also includes a turn table connected to the network of rails and configured to rotate about an axis substantially perpendicular to a surface of the turn table. The AMHS further includes a hash rail connected to and overlapping the turn table. The hash rail is configured to rotate about the axis with the turn table.