Rotating Mirror Annular Target Scanning for Continuous Laser Ablation
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Solution Overview
Problem
Current laser ablation methods fail to achieve a continuous, homogeneous, and stable plasma flow for industrial coating processes, with suboptimal duty cycle and inefficient target processing, leading to incomplete and uneven material removal.
Innovation Solution
A pulsed laser deposition process using an annular target and a rotating mirror scanner, enabling high-speed scanning and 100% laser power utilization, with the annular target design allowing for continuous scanning without discontinuations and reduced wear, and the ability to coat larger surface areas efficiently.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If a conventional target scanning arrangement with acute angle incidence is used, then the laser beam can be directed to the target, but the duty cycle is suboptimal and laser power utilization is inefficient
Solution Approach 1:
The patent inverts the conventional arrangement by placing the mirror inside the ablation chamber rather than outside, and by using normal incidence (90 degrees) instead of acute angle incidence. This inversion allows the laser beam to travel perpendicular to the target surface, maximizing energy transfer efficiency and enabling continuous scanning without the limitations of oblique angle geometry, thereby achieving both high duty cycle and optimal laser power utilization
Solution Approach 2:
The patent implements continuous scanning of the laser beam across the target surface by rotating the mirror inside the ablation chamber. This continuous motion ensures that the laser beam constantly interacts with fresh target material, maintaining uninterrupted material ablation and plasma generation, which achieves 100% duty cycle and maximizes productivity without sacrificing energy efficiency
2Device complexity
If the laser beam travels through a hole in the chamber, then the arrangement is compact, but the beam path is constrained and scanning flexibility is limited
Solution Approach 1:
The patent replaces the static beam path through a fixed hole with a dynamic scanning system where a rotatable mirror directs the laser beam across the target surface. This dynamic arrangement allows the beam to access different areas of the target continuously, providing scanning flexibility while maintaining a compact chamber structure without requiring large openings or complex external positioning mechanisms
3Productivity
If oblique scanning is used to process the target, then material can be removed, but the scanning must be discontinued periodically and wear is uneven
Solution Approach 1:
The patent uses periodic rotation of the mirror to scan the laser beam continuously across the target surface in a systematic pattern. This periodic scanning action ensures that different areas of the target are processed sequentially, preventing localized overheating and ensuring uniform wear distribution, while maintaining continuous operation without periodic discontinuations, thereby achieving both high productivity and process stability
Solution Approach 2:
The patent applies local quality by directing the laser beam to different locations on the target surface through mirror rotation, ensuring that each local area receives appropriate energy treatment. This distributed scanning approach prevents concentration of wear at single points and promotes uniform material removal across the entire target surface, enhancing both reliability and scanning continuity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach results in high-throughput, reliable, and scalable industrial coating processes with improved material distribution and reduced laser energy loss, enabling the production of high-quality coatings on large surfaces with increased production rates and reduced material waste.
Implementation Method 1
a rotating mirror (13) which is configured to redirect the laser beam (12) towards the target contact point (15c) on the target (15)
Implementation Method 2
laser beams with a very short temporal length but produced with a relatively high frequency are directed towards a target piece of material. After the release of the small fragments and particles of the target material
Data Source
AI summary
The present invention introduces a scanning arrangement and a method suitable for coating processes applying laser ablation. The arrangement is suited to prolonged, industrial processes. The arrangement comprises a target, which has an annular form. The laser beam direction is controlled by a rotating mirror locating along the center axis of the annular target. The scanning line will rotate circularly along the inner target surface when the mirror rotates. The focal point of the laser beams may be arranged to locate on the inner target surface to ensure a constant spot size. A ring-formed, a cylinder-shaped or a cut conical-shaped target may be used. The inner surface of the target may thus be tapered in order to control the release direction of the ablated material towards a substrate to be coated.