Rotating Multi-Segment Resistance Wires for Thin-Film Pressure Sensors
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Solution Overview
Problem
Existing thin-film pressure sensors have low sensitivity due to the simple straight-line wiring of induction resistors, which results in inadequate utilization of radial and tangential strains in the flat diaphragm.
Innovation Solution
The thin-film pressure sensor incorporates a first induction unit with m rotating multi-segment resistance wires arranged around the center of a circular deformation area, where m/2 wires on each side are connected in series to form induction resistors. This arrangement maximizes the utilization of radial and tangential strains, improving sensitivity and stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a simple straight line wiring arrangement is used for induction resistors, then the structure is simple and easy to manufacture, but the detection sensitivity is low due to inadequate utilization of radial and tangential strains
Solution Approach 1:
The induction resistor is divided into multiple resistance wires arranged in different directions (radial and tangential) around the circular deformation area. Each resistance wire segment responds to specific strain components, and their combined effect enhances overall detection sensitivity while maintaining a structured wiring pattern.
Solution Approach 2:
The wiring arrangement transitions from a simple one-dimensional straight line to a two-dimensional circular pattern with multiple directional components. The resistance wires are distributed around the circular deformation area at different angular positions, utilizing both radial and tangential directions to capture strain information from multiple dimensions.
2Ease of manufacture
If the induction resistor is arranged in a simple straight line, then the manufacturing process is simple, but the radial strain and tangential strain of the flat diaphragm are not fully utilized
Solution Approach 1:
The induction resistor is segmented into multiple resistance wires positioned at different angular locations around the circular deformation area. Each segment is oriented to capture specific strain components (radial or tangential), ensuring comprehensive utilization of diaphragm strains while maintaining manufacturability through systematic arrangement.
Solution Approach 2:
Different resistance wire segments are positioned at specific locations and orientations to match the local strain distribution patterns on the diaphragm surface. The wiring arrangement adapts to the local strain characteristics at different angular positions, maximizing strain utilization efficiency across the entire measurement area.
3Reliability
If resistance wires are arranged without considering strain distribution, then the structure is simple, but strain differences between two sides of the resistance wire cause twisting and reduce long-term stability
Solution Approach 1:
The resistance wires are arranged asymmetrically around the circular deformation area with specific angular positions and orientations designed to balance strain differences. This asymmetric yet balanced configuration ensures that strains on both sides of each resistance wire are comparable, preventing twisting and improving long-term stability.
Solution Approach 2:
The wiring arrangement is designed to create equipotential conditions by positioning resistance wires such that they experience equal and opposite strains from the diaphragm deformation. This balanced strain distribution prevents differential stress that would cause twisting, ensuring stable operation over time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The improved arrangement enhances the detection sensitivity of the thin-film pressure sensor, reduces strain differences between resistance wire sides, prevents twisting, and ensures a long-term stable combination with the flat diaphragm, leading to a longer service life and a more reliable structure.
Implementation Method 1
The conversion principle of the sensor with a thin-film resistor as the conversion element is based on the resistance strain effect of a metal wire. The so-called strain effect refers to a physical phenomenon that metal conductors (resistance wires, thin-film resistance strips, etc.) are deformed (stretched or compressed) under pressure and the resistance value changes with the deformation.
Data Source
AI summary
A thin-film pressure sensor and an arrangement method thereof are provided. The thin-film pressure sensor includes a flat diaphragm and a first induction unit in the shape of a thin film arranged on the flat diaphragm, where the first induction unit includes m rotating multi-segment resistance wires arranged around the center of a circle of a circular deformation area of the flat diaphragm, m/2 rotating multi-segment resistance wires on one side are connected in series to form a second induction resistor, and m/2 rotating multi-segment resistance wires on the other side are connected in series to form a fourth induction resistor, where m is a multiple of 4; the arrangement method includes arrangement for the first induction unit. The radial strain and the tangential strain of the flat diaphragm can be fully utilized, and the detection sensitivity of the thin-film pressure sensor is improved.