Rotating Nozzle Fluid Module for Plasma Mixing
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Solution Overview
Problem
Existing fluid introduction systems for plasma systems with rotatable nozzles face challenges in securely attaching fixed pipelines and meeting varying mixing needs of plasma and precursor fluids.
Innovation Solution
A fluid introduction module with a rotating nozzle featuring a main flow channel, a mixing flow channel penetrating through the nozzle's side wall, and an independent flow channel, along with a precursor supply device having a fixed housing and rotating bearing, allowing the precursor inlet to selectively communicate with either channel to mix precursor fluid with plasma, ensuring different mixing ratios.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a fixed pipeline is connected to a rotatable plasma outlet nozzle, then the precursor fluid can be introduced into the nozzle, but the pipeline will rotate when the nozzle rotates
Solution Approach 1:
The flow channel system is segmented into a fixed flow channel connected to the fixed housing and a rotating flow channel connected to the rotating nozzle. The fixed flow channel remains stationary while the rotating flow channel rotates with the nozzle, eliminating the problem of pipeline rotation while enabling precursor fluid introduction to the moving nozzle.
Solution Approach 2:
A bearing structure serves as an intermediary between the fixed housing and the rotating nozzle. This bearing allows rotational movement of the nozzle while maintaining a stable connection point for the fixed pipeline, enabling the pipeline to remain fixed while the nozzle rotates.
2Device complexity
If the precursor inlet is fixed, then the pipeline structure is simple, but it cannot meet different mixing needs of plasma and precursor fluid
Solution Approach 1:
The precursor inlet is made adjustable within the fixed housing, allowing it to selectively communicate with different positions on the rotating nozzle. This dynamic adjustment capability enables varying mixing ratios of plasma and precursor fluid while maintaining a relatively simple fixed housing structure.
Solution Approach 2:
The fixed housing with the adjustable precursor inlet serves multiple functions: it provides a stable mounting structure, allows rotation of the nozzle, and enables selective communication with different flow channels to achieve different mixing ratios. This multi-functionality reduces the need for separate systems for each function.
Data Source
AI summary
A fluid introduction module for plasma system is adapted for being disposed in a plasma system and includes a rotating nozzle and a precursor supply device. The rotating nozzle includes a main flow channel, a plasma outlet located at an end of the main flow channel, a mixing flow channel that penetrates a side wall of the rotating nozzle and communicates with the main flow channel, an independent flow channel separated from the main flow channel, and a precursor independent outlet located at an end of the independent flow channel. The precursor supply device includes a fixed housing and a rotating bearing. The fixed housing is sleeved outside the rotating nozzle and includes a precursor inlet selectively communicating with either the mixing flow channel or the independent flow channel. The rotating bearing is disposed between the rotating nozzle and the fixed housing.