Rotating Polyhedral Blind for Exposure Apparatus Light Blocking
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Solution Overview
Problem
The existing exposure apparatuses using small masks face issues with light blocking during the exposure process, leading to uneven exposure and the formation of blind stains on the substrate, which reduces the reliability of the exposure process and makes it difficult to distinguish between blind stains and other types of stains.
Innovation Solution
The exposure apparatus incorporates a polyhedral blind with a width greater than its thickness, which is rotatable around a parallel axis, allowing it to move in a direction opposite to the substrate's movement to effectively block light in non-exposure regions and prevent blind stains by adjusting its orientation from a laid state to an erect state.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a blind is used to block light in non-exposure regions, then light blocking function is improved, but blind stains are generated on the substrate due to operation differences
Solution Approach 1:
The blind is designed to rotate around a rotation axis during substrate exposure, changing its orientation from a laid state (parallel to substrate movement direction) to an erect state (perpendicular to substrate movement direction). This dynamic adjustment allows the blind to effectively block light in non-exposure regions while minimizing contact with the exposure region, thereby preventing blind stains.
Solution Approach 2:
The blind's orientation parameter is changed during the exposure process. By rotating the blind around the rotation axis, the system transitions the blind from a horizontal orientation to a vertical orientation, optimizing its light blocking capability while reducing the generation of blind stains on the substrate.
2Manufacturing precision
If the blind operates to block light, then exposure control is improved, but determination errors occur during panel inspection due to blind stains
Solution Approach 1:
The blind rotates dynamically during exposure, transitioning from a laid state that provides comprehensive light blocking to an erect state that minimizes interference with the exposure region. This dynamic operation maintains precise exposure control while significantly reducing blind stain generation, thereby improving panel inspection accuracy.
3Object-affected harmful factors
If the blind is positioned to block light effectively, then light blocking function is improved, but blind stains become visible and reduce exposure reliability
Solution Approach 1:
The blind is configured to rotate around a rotation axis during substrate exposure, transitioning from a laid state to an erect state. This dynamic positioning allows the blind to effectively block light in non-exposure regions while minimizing its presence in the exposure region, thereby preventing blind stains and maintaining high exposure reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the reliability of the exposure process by minimizing blind stains and ensuring consistent light exposure across the substrate, improving the accuracy of pattern transfer and reducing the occurrence of determination errors during panel inspection.
Implementation Method 1
a light source unit disposed above the mask, where the light source irradiates light on the substrate through the mask
Implementation Method 2
the at least one blind blocks the light irradiated from the light source unit
Data Source
AI summary
An exposure apparatus includes a mask, a substrate which passes through a region disposed below the mask while moving in a first direction, a light source unit disposed above the mask, where the light source irradiates light on the substrate through the mask, and at least one blind disposed below the light source unit, where the blind blocks the light irradiated from the light source unit, where a second direction is perpendicular to the first direction in a same plane as the first direction, the blind is a polyhedron having a width, a length and a thickness and is disposed such that a direction of the length is substantially parallel to the second direction, and the blind is rotatable around a rotation axis substantially parallel to the second direction, and where the width is greater than the thickness.