Rotating Sample Holder for Charged Particle Beam Evaluation
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Solution Overview
Problem
Current techniques are inadequate for evaluating the mechanical properties of minute structures, particularly in microscale samples, as they struggle to process and observe the entire outer periphery of samples and accurately assess properties like tension, torsion, bending, and compression without damaging the samples or causing chemical transformations.
Innovation Solution
A sample processing evaluation apparatus equipped with a charged particle beam column, a sample holder that rotates the sample, and a gas ion beam column for cleaning, allowing for comprehensive processing and observation of samples within the apparatus, including the application of various mechanical loads and imaging to reconstruct three-dimensional structures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a sample is processed and observed outside the evaluation apparatus, then the sample can be prepared in advance, but the sample may be damaged or undergo chemical transformations during handling and mounting
Solution Approach 1:
The patent combines the sample processing function and the evaluation function into a single integrated apparatus. The processing chamber and evaluation chamber are merged, allowing samples to be processed (cut, thinned, cleaned) and then immediately evaluated without removal. This eliminates handling steps that cause damage or chemical transformations, while still allowing advance preparation of larger sample blanks before they are mounted in the apparatus.
Solution Approach 2:
The patent introduces a transfer chamber as an intermediary space between the processing chamber and evaluation chamber. This transfer chamber allows samples to be moved between processing and evaluation zones without exposure to external environment, maintaining sample integrity while enabling sequential operations. The transfer chamber acts as a protected intermediary that prevents direct contact with external handling equipment.
2Measurement precision
If the entire outer periphery of a sample is processed and observed, then comprehensive evaluation is achieved, but the device complexity increases
Solution Approach 1:
The patent employs a rotatable sample holder that can rotate the sample to different orientations within the evaluation chamber. This dynamic positioning system allows the same evaluation beam and detectors to observe different surfaces and aspects of the sample by rotating it into position, eliminating the need for multiple fixed evaluation stations and reducing overall apparatus complexity while achieving comprehensive evaluation.
Solution Approach 2:
The evaluation chamber is designed with multi-functional capabilities to handle various evaluation tasks (optical evaluation, X-ray diffraction, electron microscopy) using a single chamber and sample holder system. The same physical space and sample positioning mechanism serve multiple evaluation purposes, reducing device complexity while enabling comprehensive evaluation of the entire sample outer periphery.
3Measurement precision
If multiple mechanical properties (tension, torsion, bending, compression) are evaluated, then comprehensive mechanical evaluation is achieved, but the ease of operation decreases
Solution Approach 1:
The patent segments the mechanical evaluation into separate, independently controllable loading systems for different property types (tension, compression, bending, torsion). Each loading mechanism can be activated independently based on the specific evaluation need, allowing comprehensive mechanical evaluation while maintaining operational simplicity through modular control. The sample holder system is divided into multiple actuation points that can apply different types of loads separately.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient processing and evaluation of sample configurations and properties in multiple directions, reducing sample damage and chemical transformations, while allowing for detailed observation and analysis of microscale samples.
Implementation Method 1
a charged particle beam column (101) that irradiates at least a sample (107) with a charged particle beam
Implementation Method 2
a gas ion beam column (103) that irradiates a surface to be cleaned with a gas ion beam
Data Source
AI summary
A sample processing evaluation apparatus includes a charged particle beam column that irradiates a sample with charged particle beam, a sample holder that holds both ends of the sample, and a sample stage on which the sample holder is placed, in which the sample holder is configured to rotate the sample about a rotation axis between the sample stage and the charged particle beam column.