Rotating Sample Holder with Integrated Micromanipulator
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Solution Overview
Problem
Current technologies face challenges in characterizing and fault-isolating samples during processes like deposition or ablation, as they lack the ability to maintain probes in contact with the sample while rotating, which is essential for in-situ analysis of electrical and optical parameters.
Innovation Solution
An apparatus with a sample holder that rotates while maintaining probes in contact, utilizing micromanipulators to position and control probes, allowing for in-situ characterization and fault isolation by determining electrical and optical parameters before, during, and after the process, and integrating with conventional instruments for enhanced capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the sample holder is rotated to enable multi-angle characterization, then the ability to perform in-situ analysis is improved, but maintaining probe contact with the sample becomes difficult
Solution Approach 1:
The probe assembly is integrated with the sample holder, causing them to rotate together as a unified structure. This merging ensures that probes maintain constant contact with the sample during rotation, resolving the contradiction between rotational capability and contact maintenance
Solution Approach 2:
Micromanipulators are introduced as intermediary devices between the probes and the sample. These micromanipulators actively adjust probe positions during rotation to maintain optimal contact, mediating the conflict between sample holder rotation and probe contact stability
2Measurement precision
If probes are used for in-situ characterization, then diagnostic capability is improved, but the complexity of the apparatus increases
Solution Approach 1:
The sample holder is designed to serve multiple functions: it holds the sample, enables rotation for multi-angle analysis, and integrates the probe assembly. This multi-functionality reduces the need for separate dedicated components, managing complexity while enabling precise in-situ measurements
Solution Approach 2:
The probe assembly is nested within or integrated into the sample holder structure. This nesting approach allows the probes to be positioned precisely without requiring separate external mounting systems, reducing overall apparatus complexity while maintaining measurement precision
3Productivity
If the probe assembly rotates with the sample holder, then continuous monitoring is improved, but the mechanical complexity increases
Solution Approach 1:
The probe assembly rotates with the sample holder as an integrated unit rather than as a separate rotating component. This merging eliminates the need for independent rotational mechanisms for the probes, reducing mechanical complexity while enabling continuous monitoring during sample rotation
Data Source
AI summary
The disclosed apparatus may include support portions, a frame (such as a base) configured to maintain the support portions in a spaced-apart configuration, a sample holder configured to receive a sample, and a probe assembly including micromanipulators configured to position one or more probes in contact with the sample. The sample holder may rotate between the support portions, and the probe assembly may rotate with the sample holder so that the one or more probes may maintain contact with a sample in the sample holder as the sample holder is rotated, for example, to expose a portion of the sample for processing. Various other methods, systems, and computer-readable media are also disclosed.