Multi-Axis Rotating Sample Holder for Particle Beam Alignment

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Solution Overview

Problem

Existing particle beam devices with sample holders face challenges in accurately aligning multiple samples without colliding with device components, particularly when using combination devices with two particle beam columns, leading to time-consuming and inaccurate sample analysis.

Innovation Solution

The particle beam device incorporates a sample holder with multiple rotatable axes of rotation, allowing for precise alignment of samples relative to the optical axes of both particle beam columns, reducing the risk of collision and enabling efficient positioning of samples within the raster area.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If a sample holder with multiple sample holding devices is used to analyze multiple samples, then the quantity of samples analyzed increases, but the risk of collision with device components increases and alignment accuracy decreases

Engineering Contradiction:

Improvenumber of samplesVSAvoidcollision risk

Core Design Contradiction:

Quantity of substanceVSReliability

Solution Approach 1:

The sample holder is designed with multiple degrees of freedom including rotation about a first axis, rotation about a second axis, and translation along an optical axis, allowing dynamic positioning of multiple sample holding devices to avoid collisions while maintaining alignment with particle beam columns

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The invention adds rotational degrees of freedom (first and second axes of rotation) to the traditional linear translation stage, creating a multi-dimensional positioning system that can accommodate multiple samples at different angular positions without colliding with beam columns

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Measurement precision

If manual alignment of samples is performed to achieve desired orientation, then alignment accuracy can be adjusted, but analysis time increases significantly

Engineering Contradiction:

Improvealignment accuracyVSAvoidanalysis time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The invention replaces manual mechanical alignment with an automated control system that controls the movement elements to rotate and translate the sample holder, bringing samples into desired positions automatically without manual intervention

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The control system automatically manages the positioning of multiple samples by controlling the rotation and translation of the sample holder, eliminating the need for operator intervention in the alignment process

Inventive Principle:

Principle #25Self-service

3Measurement precision

If frequent realignment and manual adjustment are performed for multiple samples, then alignment accuracy is maintained, but productivity decreases

Engineering Contradiction:

Improvealignment accuracyVSAvoidanalysis throughput

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

The sample holder is designed to continuously position multiple samples in sequence without requiring removal or frequent realignment, maintaining continuous particle beam analysis across multiple samples by rotating to different angular positions

Inventive Principle:

Principle #20Continuity of useful action

Solution Approach 2:

The sample holder serves multiple functions by simultaneously supporting multiple sample holding devices and enabling sequential positioning of each sample, replacing the need for separate alignment operations for each sample

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the flexibility and accuracy of sample alignment, allowing for simultaneous analysis of multiple samples without the need for frequent realignment or manual adjustment, thereby reducing analysis time and preventing collisions with device components.

Implementation Method 1

electrons in particular are emitted by the sample to be analyzed (so-called secondary electrons)

Methodology Applied

Scientific EffectSecondary electron emission: Electron Impact Desorption

Implementation Method 2

electrons of the primary electron beam are backscattered on the sample to be analyzed (so-called backscattered electrons)

Methodology Applied

Scientific EffectBackscattering: Compton Scattering

Data Source

PatentUS9190242B2Particle beam device having a sample holder

Publication Date: 2015.11.17 CARL ZEISS MICROSCOPY GMBH

AI summary

A particle beam device and a sample receptacle apparatus, which has a sample holder, are disclosed. The sample holder is arranged in a movable fashion along at least a first axis and along at least a second axis. Furthermore, the sample holder is arranged in a rotatable fashion about a first axis of rotation and about a second axis of rotation. A first sample holding device is arranged relative to the sample holder in a rotatable fashion about a third axis of rotation, in which the third axis of rotation and the second axis of rotation are at least in part arranged laterally offset with respect to one another. Furthermore, a control apparatus is provided, in which the first sample holding device is rotatable about the third axis of rotation into an analysis position and/or treating position using the control apparatus.