Rotating Sensor Head for Vacuum Deposition Rate Measurement
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Solution Overview
Problem
The existing thin film deposition processes require cumbersome and time-consuming procedures to replace deposition rate measuring sensors, which involves releasing and re-establishing the vacuum state in the vacuum chamber, leading to inefficiencies and production delays.
Innovation Solution
A deposition apparatus and method that allows for the rapid and efficient replacement of deposition rate measuring sensors without releasing the vacuum state, utilizing a sensor extractor and inserter with vacuum maintaining valves to rotate sensor heads and support structures, enabling continuous operation by maintaining the vacuum state during sensor replacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the deposition rate measuring sensor is replaced by releasing and re-establishing the vacuum state in the vacuum chamber, then the sensor can be replaced, but the deposition process is interrupted and production efficiency decreases
Solution Approach 1:
The sensor head is divided into multiple sensor units that can be independently replaced. The sensor head includes a first sensor unit and a second sensor unit, allowing one sensor to be replaced while the other continues to function, thus maintaining deposition process continuity.
Solution Approach 2:
Multiple sensor units are integrated into a single sensor head assembly that can be rotated. This allows the system to combine the functionality of multiple sensors and switch between them by rotation, enabling seamless replacement without interrupting the deposition process.
2Ease of operation
If the vacuum state is released for sensor replacement, then the sensor can be accessed and replaced, but additional time is consumed and the deposition process is delayed
Solution Approach 1:
The sensor head is designed to be rotatable within the vacuum chamber, allowing dynamic switching between sensor units. This rotational mechanism enables operators to access and replace sensors without breaking the vacuum seal, significantly reducing downtime.
Solution Approach 2:
A rotary mechanism acts as an intermediary between the sensor replacement operation and the vacuum chamber. This intermediary allows sensor access through rotation while maintaining the vacuum barrier, eliminating the need to release vacuum for sensor replacement.
3Productivity
If multiple sensor heads are used with separable pieces, then sensor replacement becomes more efficient, but the device complexity increases
Solution Approach 1:
The sensor head is segmented into separable pieces, each containing sensor units. This segmentation allows individual sensor pieces to be quickly exchanged without replacing the entire sensor head, improving replacement speed while keeping the added complexity localized to small modular components.
Data Source
AI summary
A deposition apparatus includes a vacuum chamber, a sensor head located in the vacuum chamber and including a plurality of deposition rate measuring sensors, a sensor extractor coupled to the vacuum chamber and including a first vacuum maintaining valve, the sensor extractor being configured to extract one of the deposition rate measuring sensors to outside the vacuum chamber, and a sensor inserter coupled to the vacuum chamber and including a second vacuum maintaining valve, the sensor inserter being configured to insert one of the deposition rate measuring sensors into the sensor head.