Rotating Stage Temperature Sensor Switching for In-Plane Uniformity
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Solution Overview
Problem
Existing substrate processing apparatuses struggle to accurately measure temperatures at multiple locations on a rotating stage due to limitations in temperature sensor distribution and switching mechanisms, leading to inefficiencies in heating and cooling processes.
Innovation Solution
A substrate processing apparatus equipped with a rotatable stage featuring distributed temperature sensors, a conversion part for signal processing, and a switching part with electrode parts and a contactor that allows for seamless switching of temperature sensors during rotation, enabling precise temperature measurement at multiple locations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple temperature sensors are arranged on a rotating stage to measure temperatures at multiple locations, then temperature measurement capability is improved, but device complexity increases due to the need for switching mechanisms
Solution Approach 1:
The rotating stage is segmented into multiple angular positions, with temperature sensors distributed at different locations. Each sensor monitors temperature at its specific position, and the switching mechanism selectively connects sensors based on the stage's rotational position, enabling multi-point measurement without requiring all sensors to be connected simultaneously
Solution Approach 2:
The switching mechanism dynamically connects temperature sensors to the signal processing circuit based on the real-time rotational position of the stage. As the stage rotates, the switching mechanism activates the appropriate sensor for the current angular position, enabling continuous temperature monitoring across multiple locations without permanent complex wiring
2Manufacturing precision
If temperature sensors are distributed on the rotating stage to monitor multiple locations, then in-plane uniformity is improved, but signal switching reliability deteriorates due to rotational movement
Solution Approach 1:
The switching mechanism is designed to operate synchronously with the stage rotation, dynamically selecting the active temperature sensor based on the stage's angular position. This dynamic switching ensures that the correct sensor is always connected during its measurement phase, maintaining signal reliability despite the rotating environment
Solution Approach 2:
The switching mechanism is pre-configured with knowledge of the stage's rotational positions and sensor locations. Before the stage reaches each sensor's optimal measurement position, the switching mechanism is already prepared to connect the appropriate sensor, ensuring seamless transitions and reliable signal acquisition without interruption or error
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate temperature monitoring at multiple locations on a rotating stage, improving in-plane uniformity and efficiency of heating or cooling processes, particularly in film formation and deposition applications.
Implementation Method 1
a plurality of temperature sensors arranged on the stage in a distributed manner
Implementation Method 2
a contact part having a contactor, that is fixed to the stage, brought into contact with the electrode of one of the plurality of electrode parts at a time, and connected to the conversion part
Data Source
AI summary
There is a substrate processing apparatus comprising: a rotatable stage; a plurality of temperature sensors arranged on the stage in a distributed manner; a conversion part that processes signals outputted from each of the plurality of temperature sensors; and a switching part that switches the temperature sensor connected to the conversion part, the switching part includes: a plurality of electrode parts having electrodes, that are provided in one-to-one correspondence with the plurality of temperature sensors, arranged side by side along a rotation direction of the stage, and connected to the respective corresponding temperature sensors; and a contact part having a contactor, that is fixed to the stage, brought into contact with the electrode of one of the plurality of electrode parts at a time, and connected to the conversion part.