Rotating Substrate Holders for Smooth Wafer Release After Pin Wear
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Solution Overview
Problem
Current substrate holding devices experience premature wear of support pins due to contact with the substrate's outer periphery edge, leading to inefficient substrate release and increased maintenance frequency, which can result in substrate damage and transportation issues.
Innovation Solution
A substrate holding device with rotating holders that include a rotating base, a position regulator, and a pushing member, allowing for smooth release of the substrate even when the position regulator is worn, by switching between holding and releasing positions using a rotating mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If support pins contact the substrate's outer periphery edge to hold the substrate, then the substrate can be securely held and positioned, but the support pins wear prematurely and require frequent replacement
Solution Approach 1:
The support pin is designed with a movable contact portion that can rotate relative to the pin body. During substrate holding, the contact portion rotates to follow the substrate's outer periphery edge, converting the substrate's rotational motion into beneficial friction that reduces wear on the pin while maintaining secure contact and positioning.
Solution Approach 2:
The contact portion is pre-configured with a specific shape and orientation that allows it to automatically engage and follow the substrate's outer periphery edge upon contact. This preliminary configuration ensures that the contact portion is optimally positioned to reduce wear from the outset, rather than requiring adjustment during operation.
2Ease of operation
If the support pins are worn, then the substrate cannot be smoothly released, but increasing the frequency of pin replacement increases maintenance time and cost
Solution Approach 1:
The movable contact portion that can rotate independently reduces wear during operation, thereby extending the interval between maintenance activities. This dynamic design ensures that even after extended use, the contact portion maintains sufficient friction to allow smooth substrate release without requiring frequent replacements.
Solution Approach 2:
The contact portion's ability to change its rotational state and follow the substrate's edge creates a variable friction condition that adapts to usage. This parameter change allows the system to maintain effective substrate release functionality over longer periods, reducing maintenance frequency while preserving operational ease.
3Reliability
If the substrate is not smoothly released due to worn support pins, then substrate transportation may be compromised and damage may occur, but using more durable pins increases device complexity
Solution Approach 1:
The support pin is segmented into a pin body and a separate movable contact portion. This segmentation allows the contact portion to independently rotate and follow the substrate's edge, reducing wear and ensuring reliable substrate release for safe transportation, while keeping the overall structure relatively simple and modular.
Solution Approach 2:
The dynamic rotation capability of the contact portion provides the necessary adaptability for reliable substrate release without requiring complex mechanisms. The simple rotational degree of freedom enables the contact portion to maintain optimal contact with the substrate's outer periphery edge throughout operation, ensuring transportation reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design extends the lifespan of the substrate holding device and apparatus by minimizing the frequency of replacing holders, ensuring smooth substrate release and preventing damage during transportation.
Implementation Method 1
a rotating base as the base that is rotatable around a longitudinal shaft axis
Implementation Method 2
a pushing member that is provided on the rotating base to protrude toward the outer periphery edge of the substrate, spaced apart from the substrate when the rotating position regulator is under the first condition, and contacts the outer periphery edge of the substrate to push the substrate in a direction apart from the position regulator when the rotating position regulator is switched from the first condition to the second condition
Data Source
Figure 1
Figure 2
Figure 3A~3B
AI summary
A substrate holding device includes a spin table, and three or more holders. The three or more holders each have a base and a position regulator, and are arranged on an outer periphery of the spin table while being spaced apart from one another. At least one of the holders includes a rotating base as the base that is rotatable around a longitudinal shaft axis, a rotating position regulator as the position regulator that regulates a horizontal position of the substrate on the spin table, a rotating mechanism configured to switch the rotating position regulator between a first condition and a second condition, and a pushing member that is spaced apart from the substrate when the rotating position regulator is under the first condition and pushes the substrate in a direction apart from the position regulator when the rotating position regulator is switched to the second condition.