Rotating Table Temperature Profiling via Radial Scanning
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Solution Overview
Problem
Current heat treatment apparatuses face challenges in accurately measuring temperature profiles on rotating substrates due to limited space for thermocouples and difficulties in detecting temperature profiles across the entire surface, especially when the substrates are rotated and influenced by heater placement and gas temperature.
Innovation Solution
A temperature measurement apparatus that includes a radiation temperature measurement unit for scanning the surface of a rotating table in the radius direction, a temperature map generating unit to specify and store temperature measurements based on scanning operations and rotating speed, and a display unit to show the temperature profile, allowing for accurate temperature mapping during substrate processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple thermocouples are used to measure temperature profile on the entire substrate surface, then measurement precision is improved, but device complexity increases due to limited space on the rotating table
Solution Approach 1:
The patent uses a single thermocouple to measure temperature at one location on the rotating table, then creates a complete temperature profile map by repeatedly measuring different radial positions as the table rotates. The control unit synthesizes multiple single-point measurements into a comprehensive temperature distribution map, effectively copying the function of multiple thermocouples using a single sensor through temporal and spatial sampling.
Solution Approach 2:
The patent transforms a spatial measurement problem (measuring temperature at multiple locations simultaneously) into a temporal measurement problem (measuring at one location sequentially over time). By rotating the table, the system converts radial position information into temporal sequence information, allowing a single thermocouple to gather data from multiple radial positions by measuring at different times as each position passes under the sensor.
2Reliability
If the rotating table is immobilized to connect wiring for thermocouple measurement, then measurement reliability is improved, but productivity decreases due to inability to rotate substrates
Solution Approach 1:
The patent captures temperature data at discrete radial positions during rotation and reconstructs the complete temperature profile through computational processing. The control unit creates a virtual representation of the temperature distribution by synthesizing sequential measurements, allowing accurate temperature mapping without physically immobilizing the rotating table or substrates.
Solution Approach 2:
The patent replaces the mechanical requirement of immobilizing the rotating table for measurement with a computational approach. Instead of mechanically stopping the table to connect wiring, the system uses the rotation itself as the measurement mechanism and employs software-based temperature profile reconstruction to achieve the same measurement objective while maintaining mechanical motion.
3Object-affected harmful factors
If temperature measurement is performed after heater temperature is raised for safety, then safety is improved, but measurement precision decreases for actual process conditions
Solution Approach 1:
The patent enables continuous temperature measurement and profiling during the actual film formation process without interruption. The measurement system operates continuously as substrates rotate and are processed, capturing real temperature conditions throughout the entire process cycle rather than performing separate pre-heating measurements, thereby maintaining both safety and measurement accuracy for actual process conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise temperature profiling on rotating substrates by scanning multiple areas simultaneously, overcoming limitations of traditional methods and providing comprehensive temperature data for improved process control and safety.
Implementation Method 1
a radiation temperature measurement unit configured to measure the temperature of plural temperature measurement areas on a surface of the rotating table
Data Source
AI summary
A temperature measurement apparatus for measuring a temperature profile of a substrate mounted on a rotating table, including a radiation temperature measurement unit configured to measure the temperature of plural temperature measurement areas on a surface of the rotating table in a radius direction of the rotating table by scanning the surface of the rotating table in the radius direction; a temperature map generating unit that specifies the address of the temperature measurement area based on the number of the temperature measurement areas measured by the radiation temperature measurement unit for each of the scanning operations in the radius direction of the rotating table, and the rotating speed of the rotating table, and stores the temperature in correspondence with the corresponding address in a storing unit; and a temperature data display processing unit that displays a temperature profile of the rotating table.