Rotating Tank Support Jig for Uniform Interior Cleaning

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Solution Overview

Problem

Conventional tank cleaning methods fail to achieve uniform cleaning inside tanks, leading to contamination of chemical solutions used in semiconductor processes, are costly and time-consuming, and pose safety risks due to incomplete cleaning of the tank's top space and potential deformation of the tank.

Innovation Solution

A support jig that allows a tank to be mounted in a lying position and rotated, using a combination of bases and auxiliary members with rollers to agitate cleaning fluid, reducing the amount of fluid needed and uniformly cleaning the tank interior.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If cleaning fluid is sprayed to clean the inside of the tank, then the tank can be cleaned, but uniform cleaning fails to be performed and contaminations on the inner wall fail to be removed

Engineering Contradiction:
Improvecleaning uniformityVSAvoidcleaning effectiveness
Core Design Contradiction:
Manufacturing precisionVSEase of operation

Solution Approach 1:

The patent applies the dynamics principle by placing the tank in a lying position and rotating it during cleaning. This dynamic approach allows cleaning fluid to continuously contact different areas of the inner wall through rotation, achieving uniform cleaning coverage that static spraying cannot provide. The rotation mechanism transforms the cleaning process from a static spray operation to a dynamic multi-angle cleaning system.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent transitions from vertical tank positioning to horizontal lying position, adding a rotational dimension to the cleaning process. This dimensional change allows cleaning fluid to reach all surfaces including the top space area, and enables the tank to be cleaned while in a stable horizontal orientation rather than requiring vertical positioning.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If the tank is filled with cleaning fluid to clean the tank, then the inner wall can be cleaned, but a large amount of cleaning fluid is required and long-term contact is needed

Engineering Contradiction:
Improvecleaning coverageVSAvoidcleaning fluid volume
Core Design Contradiction:
Manufacturing precisionVSQuantity of substance

Solution Approach 1:

The patent applies partial action by injecting only a small amount of cleaning fluid (5-20% of tank volume) rather than filling the entire tank. The rotation of the lying tank distributes this partial amount of fluid uniformly across the inner wall surface, achieving complete coverage without requiring excessive fluid volume. This resolves the contradiction between thorough cleaning coverage and minimal fluid consumption.

Inventive Principle:
Principle #16Partial or excessive action

Solution Approach 2:

By rotating the tank in a lying position, the cleaning fluid is dynamically distributed across the entire inner surface area. This dynamic distribution allows a small volume of fluid to cover a large surface area uniformly, eliminating the need for large fluid volumes required in static filling methods.

Inventive Principle:
Principle #15Dynamics

3Manufacturing precision

If the tank is filled with cleaning fluid, then the inner wall can be cleaned, but the top space inside the tank fails to be cleaned

Engineering Contradiction:
Improvecleaning coverageVSAvoidpurity of chemical solution
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

Changing the tank from vertical to horizontal lying position fundamentally alters fluid distribution. In the lying position, cleaning fluid coats the entire inner circumference including areas that would be at the top in vertical orientation. Rotation ensures even the highest points of the inner wall receive uniform fluid coverage, eliminating uncleaned zones.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The rotational motion continuously brings different portions of the inner wall into contact with cleaning fluid. This dynamic process ensures that all surfaces, including areas equivalent to the top space in vertical orientation, are thoroughly cleaned, preventing contamination of subsequent chemical solutions.

Inventive Principle:
Principle #15Dynamics

4Ease of operation

If an annular support frame is used to support the tank in lying position, then the tank can be cleaned, but the support frame requires advance assembling and causes variations in stress to the tank

Engineering Contradiction:
Improvetank positioningVSAvoidsupport structure complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The support structure is segmented into multiple discrete rollers positioned at different locations around the tank. These individual roller elements can be independently positioned and adjusted, eliminating the need for complex pre-assembled frames. The segmented approach allows flexible adaptation to different tank sizes and simplifies both assembly and stress distribution.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Rollers serve as intermediary elements between the support structure and the tank body. These simple roller intermediaries reduce direct contact stress points and allow smooth rotation while providing stable support. The rollers act as mediators that convert complex frame-tank interactions into simple rolling contact, reducing stress variations.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The support jig enables efficient, cost-effective, and safe cleaning by minimizing fluid usage, preventing contamination, and preventing tank deformation, thereby maintaining chemical solution purity and improving semiconductor process yield.

Implementation Method 1

a plurality of bases (2a, 2b, 2c) and an auxiliary member (3) which abut on an outer circumferential face (S) of the tank (9) slidably in a circumferential direction (W) to the outer circumferential face (S)

Methodology Applied
Scientific EffectFriction: Friction

Implementation Method 2

a cleaning step of rotating the tank (9) which is mounted on the support jig (1) in a lying position and has the cleaning fluid (8) injected inside around an axial line (L) of the tank (9)

Methodology Applied
Scientific EffectRotation:

Data Source

PatentUS20260027603A1Support Jig and Tank Cleaning Method
Publication Date: 2026.01.29 VALQUA LTD
  • US20260027603A1 patent drawing
  • US20260027603A1 patent drawing
  • US20260027603A1 patent drawing

AI summary

Provided are a support jig and a tank cleaning method. Provided is a support jig for supporting a tank that is cylindrical in shape and is lying and for moving the tank rotationally, the support jig including: a plurality of bases configured to abut on an outer circumferential face of the tank slidably in a circumferential direction to the outer circumferential face; and at least one auxiliary member provided to at least one of the plurality of bases, the auxiliary member being configured to abut on the outer circumferential face of the tank slidably in the circumferential direction to the outer circumferential face, in which the plurality of bases and the auxiliary member are configured to support the tank that is lying such that the tank is allowed to move rotationally.