Rotating Trap Unit for Automatic Byproduct Collection in Semiconductor Equipment
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Solution Overview
Problem
The existing byproduct collection apparatus in semiconductor manufacturing is inefficient due to the need for manual replacement, which disrupts the process, exposes workers to hazardous gases, and reduces production rates, as the apparatus becomes filled with ignitable, corrosive, and noxious substances, causing pressure control issues in the process chamber.
Innovation Solution
An automatically replaceable apparatus with rotatable trap units is installed between the process chamber and vacuum pump, featuring a cylindrical casing, servo motor, pressure gauges, isolation valves, and a control unit that automatically transfers collected byproducts to cleaned units, maintaining airtightness and efficient operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual replacement of the collector is performed, then the collector can be replaced with a new one, but worker safety is compromised due to exposure to harmful substances and noxious gases
Solution Approach 1:
The system performs automatic replacement of the collector through automated mechanisms including robotic arms or automated transfer devices that can handle the collector replacement without human intervention, allowing the system to service itself and eliminate worker exposure to harmful substances
Solution Approach 2:
An automated intermediary mechanism (such as a robotic arm or automated transfer device) is introduced between the operator and the collector replacement process, allowing the collector to be replaced safely without direct human contact with harmful substances
2Productivity
If manual replacement of the collector is performed, then the collector can be replaced, but the operation rate of the process chamber and productivity are reduced due to time spent on replacement
Solution Approach 1:
The automated replacement system operates without human intervention, significantly reducing the time required for collector replacement and minimizing disruption to the process chamber operation rate and overall productivity
Solution Approach 2:
The system prepares the replacement collector in advance and positions it ready for immediate installation, reducing the actual replacement time when the current collector needs to be changed
3Productivity
If a single collector is used, then the structure is simple, but the operation rate is reduced due to frequent manual replacement
Solution Approach 1:
The collector system is divided into multiple segments or modular units that can be independently replaced, allowing one collector to be in use while another is prepared or being replaced, thereby increasing the operation rate without requiring a completely complex system
4Quantity of substance
If the collector is filled with byproducts, then byproduct collection is effective, but pressure control in the process chamber becomes difficult and the gas flow passage is narrowed
Solution Approach 1:
Pressure sensors and flow sensors provide feedback to the control system, which monitors the collector's filling status and automatically triggers replacement when pressure control becomes difficult or the gas flow passage is narrowed, maintaining optimal pressure control in the process chamber
Data Source
AI summary
Disclosed herein are an automatically replaceable apparatus for collecting byproducts in semiconductor producing equipment and a control method thereof. The apparatus includes several trap units mounted to a vertical shaft at regular angular intervals and rotating in response to a driving direction of a servo motor. Upper and lower plates support the vertical shaft, and connect byproduct inlet and outlet ports, cleaning-water supply and discharge ports, and dry-gas supply and exhaust ports to the respective trap units. Trap and plate coupling means are extended at normal times to air-tightly seal gaps between the upper and lower plates and the trap units, and contracted when the trap units are rotated in a predetermined direction for the replacement. The servo motor is mounted to a lower surface of the lower plate and rotates the trap units within a predetermined angular range. A control unit controls the operation of the components.