Rotating Vacuum Chamber Coupling Assembly for Bias Voltage
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Solution Overview
Problem
Conventional methods for supplying an electrical bias voltage to a rotating platen in a vacuum chamber are complex, expensive, and require frequent maintenance, limiting operational time.
Innovation Solution
A coupling system utilizing a metallic ball bearing, bearing sleeve, and EMI shielding gasket seated within the bearing sleeve, which conveys the bias voltage from a source to the rotating platen through a copper shaft, allowing reliable and cost-effective introduction of the voltage into the vacuum chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional stationary feed with copper rings, carbon brushes, and wire mesh is used to transmit power to the rotating plate, then the bias voltage can be introduced into the chamber, but the arrangement becomes complex and expensive with high maintenance requirements
Solution Approach 1:
The patent extracts the power transmission function from the complex mechanical coupling system (copper rings, carbon brushes, wire mesh) and implements it through a simplified metallic ball bearing assembly that directly supports the rotating platen while conducting electricity. This removes the need for separate stationary feed components and their associated complexity.
Solution Approach 2:
The metallic ball bearing assembly serves multiple functions simultaneously: it provides mechanical support for the rotating platen, enables rotational movement, and conducts the bias voltage from the stationary source to the rotating plate. This multi-functionality eliminates the need for separate components for each function, reducing overall system complexity.
2Duration of action of moving object
If swash plates and flexible couplings are used to convey bias voltage to the rotating plate, then power transmission is achieved, but the arrangement becomes costly and creates maintenance issues that limit chamber usage time
Solution Approach 1:
The patent employs a metallic ball bearing assembly that is simpler and more durable than swash plates or flexible couplings. While ball bearings have finite life, their simplicity allows for easier replacement compared to complex mechanical couplings, effectively reducing maintenance burden and extending operational time between maintenance intervals.
Solution Approach 2:
The ball bearing assembly requires minimal intervention during operation and can be replaced as a simple unit when needed, allowing the chamber to operate for extended periods without maintenance. The design enables the system to serve itself between maintenance events without requiring complex adjustment or repair procedures.
3Ease of manufacture
If complex coupling arrangements are used to introduce bias voltage, then the voltage can be supplied to the rotating plate, but the system becomes expensive and requires frequent maintenance
Solution Approach 1:
The patent replaces the complex mechanical power transmission system (copper rings, carbon brushes, swash plates) with a metallic ball bearing assembly that combines mechanical support and electrical conduction in a single integrated component. This substitution dramatically reduces manufacturing cost while maintaining or improving reliability.
Solution Approach 2:
The use of metallic ball bearings provides both mechanical functionality (support and rotation) and electrical functionality (conduction of bias voltage) through the inherent properties of the metallic material. This composite approach to material selection eliminates the need for multiple specialized components, reducing both cost and complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a simple, reliable, and cost-effective means to introduce a bias voltage into a vacuum chamber, reducing maintenance needs and operational costs while maintaining a stable plasma environment.
Implementation Method 1
The ball bearing fits within the EMI shielding gasket, about a metallic shaft which in turn is coupled to a source of the bias voltage... conveying the bias voltage from a source to the rotating platen
Implementation Method 2
an EMI shielding gasket seated within the bearing sleeve... The ball bearing fits within the EMI shielding gasket
Implementation Method 3
The coupling comprises a metallic ball bearing... The ball bearing fits within the EMI shielding gasket, about a metallic shaft
Data Source
Figure 1~10
Figure 2
Figure 3
AI summary
A coupling (30) for the introduction of a bias voltage into a vacuum chamber. The coupling consists of a metallic ball bearing assembly (36), a bearing sleeve or cup (34), and an EMI shielding gasket (42) seated within the bearing sleeve or cup. The ball bearing assembly is fitted within the EMI shielding gasket, about a metallic shaft (32) which, in turn, is coupled to a source of the bias voltage. The bearing sleeve or cup is, in turn, coupled to a rotating component such as a platen, for receiving the bias voltage within the vacuum chamber.