Non-Contact Rotation Angle Detection for Substrate Processing
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Solution Overview
Problem
Existing rotation angle detection methods for substrate processing apparatuses are inefficient in accurately detecting the rotation angle of rotary shafts, particularly in environments like vacuum and high temperature, where traditional contact-based methods fail.
Innovation Solution
A rotation angle detection apparatus is developed, featuring a movable pattern on the outer peripheral surface of a rotary shaft and a stationary pattern arranged around it, generating an electromagnetic induction voltage as the patterns overlap and change with rotation, allowing for non-contact detection of the rotation angle using AC power and voltage detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional contact-based detection methods are used, then the detection structure is simple, but the detection reliability deteriorates in vacuum and high temperature environments
Solution Approach 1:
The patent replaces contact-based mechanical detection methods with a non-contact electromagnetic induction-based detection system. The movable pattern on the rotary shaft interacts with the stationary pattern through electromagnetic coupling, eliminating mechanical contact and enabling reliable operation in vacuum and high temperature environments where contact-based methods fail.
Solution Approach 2:
The electromagnetic induction detection system provides universal applicability across different environmental conditions including vacuum, high temperature, and clean room environments. The same basic structure can detect rotation angles in multiple substrate processing apparatuses without requiring environment-specific modifications.
2Reliability
If non-contact electromagnetic induction method is used, then the detection reliability in vacuum and high temperature is improved, but the measurement precision requirement increases
Solution Approach 1:
The patent employs patterns with specific local characteristics - tooth-like or wave-like structures with defined periods and amplitudes. The movable pattern on the rotary shaft and stationary pattern are designed with localized geometric features that create distinct electromagnetic coupling variations, enabling precise rotation angle measurement through analysis of these localized pattern interactions.
Solution Approach 2:
The system detects rotation angle by monitoring changes in electromagnetic coupling parameters between the movable and stationary patterns. As the rotary shaft rotates, the overlapping state of the patterns changes, causing measurable variations in electromagnetic coupling strength, which are converted into voltage signals for precise angle measurement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables accurate and reliable detection of the rotation angle in real-time, enhancing the quality and reliability of substrate processing by ensuring proper rotation of the rotary shafts, even in challenging environments like vacuum and high temperatures.
Implementation Method 1
A physical quantity changing according to a change in the overlapping state between the movable pattern and the stationary pattern is detected
Data Source
AI summary
A rotation angle detection apparatus includes a movable pattern prepared on an outer peripheral side surface of a rotary shaft and having a shape that changes along a circumferential direction of the outer peripheral side surface; and a stationary pattern fixedly arranged around the rotary shaft so as to face the movable pattern. An overlapping state between the movable pattern and the stationary pattern changes by rotation of the rotary shaft. A physical quantity changing according to a change in the overlapping state between the movable pattern and the stationary pattern is detected, and a rotation angle of the rotary shaft is detected based on the physical quantity.