Rotation Angle Measuring System for Sub-Micron Machining
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Solution Overview
Problem
Current machine tools face challenges in achieving sub-micron or nano-level machining precision due to the limitations of high-resolution displacement measuring devices, which are complex, large, and lack the capability to measure rotation angles effectively, making it difficult to integrate them with machine tools for higher dimensional machining.
Innovation Solution
A rotation angle measuring device comprising a light source, beam splitters, displacement measuring modules, an image sensor, and a processing unit that generates and analyzes interference patterns to calculate displacement values and rotation angles, allowing for precise measurement of tiny rotation angles with a simpler and smaller structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a high resolution displacement measuring device is used to achieve sub-micron or nano level machining precision, then measurement precision is improved, but device complexity and size increase
Solution Approach 1:
The patent replaces complex mechanical displacement measuring devices with an optical measurement system using light beams, beam splitters, and interference patterns. This substitution achieves high measurement precision while significantly reducing device complexity and size, as the optical system can be integrated directly into the machine tool structure without bulky mechanical components.
Solution Approach 2:
The patent integrates multiple measurement functions into a single optical system that can simultaneously measure both displacement and rotation angle. The same optical components (light source, beam splitters, displacement measuring modules) serve multiple purposes: measuring linear displacement of the ball screw and rotation angle of the workpiece, eliminating the need for separate measuring devices.
2Measurement precision
If a high resolution displacement measuring device is used to achieve sub-micron or nano level machining precision, then measurement precision is improved, but the device size increases
Solution Approach 1:
The patent replaces bulky mechanical measuring devices with a compact optical system. The optical components (light source, beam splitters, displacement measuring modules) can be arranged in a space-efficient configuration that integrates directly into the machine tool, achieving high measurement precision without increasing device size.
Solution Approach 2:
The patent nests the optical measuring system within the existing machine tool structure. The light beams and optical components are arranged to utilize the available space within the machine tool, with the optical path integrated into the mechanical structure, thereby achieving high measurement precision without increasing the overall device volume.
3Measurement precision
If a displacement measuring device is used to measure linear displacement, then displacement measurement is achieved, but rotation angle measurement capability is lost
Solution Approach 1:
The patent designs the optical measuring system to perform multiple measurement functions simultaneously. The same optical components (light source, beam splitters, displacement measuring modules) can measure both linear displacement of the ball screw and rotation angle of the workpiece, providing versatile measurement capability without requiring separate devices.
Solution Approach 2:
The patent segments the optical path into different measurement channels using beam splitters. One optical path measures linear displacement while another measures rotation angle, allowing both measurement functions to operate simultaneously and independently within the same system, thereby achieving measurement versatility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables sub-micron or nano-level machining precision by providing a compact and high-resolution rotation angle measurement system that can be easily integrated with machine tools, reducing beam energy loss and enhancing measurement accuracy.
Implementation Method 1
a light source configured to generate a first light beam with a first polarization direction and a second light beam with a second polarization direction
Implementation Method 2
The image sensor is configured to sense a first interference pattern generated by the first and second light beams passing through the first displacement measurement module
Implementation Method 3
The first beam splitter is configured to split the first and second light beam to generate a third light beam with the first polarization direction and a fourth light beam with the second polarization direction
Implementation Method 4
The image sensor is configured to sense a first interference pattern generated by the first and second light beams passing through the first displacement measurement module
Data Source
AI summary
A rotation angle measuring device includes a light source for generating a first light beam with a first polarization direction and a second light beam with a second polarization direction; a first beam splitter for splitting the first light beam and the second light beam to generate a third light beam and a fourth light beam; an image sensor for sensing a first interference pattern generated by the first and second light beams passing through a first displacement measurement module, and sensing a second interference pattern generated by the third and fourth light beams passing through a second displacement measurement module; and a processing unit for calculating two displacement values at two different positions on a measured object according to the first and second interference patterns, in order to further calculate a rotation angle of the rotation angle measuring device relative to the measured object along a first axis.