Rotation Body Compartment Design for EUV Light Source Stability
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Solution Overview
Problem
Existing EUV light source apparatuses face challenges in stably supplying plasma raw materials to the irradiation position due to material consumption and scattering, leading to rotational disturbances and debris issues, which affect the stability and longevity of the light source.
Innovation Solution
A rotation body with a shaft circumference compartment, a raw material accommodating compartment, and an entering prevention portion is designed to prevent plasma raw material from entering the shaft circumference compartment, allowing for continuous and stable supply of the material to the irradiation position, while maintaining a stable rotation and reducing debris.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the plasma raw material is supplied to the rotation body using centrifugal force, then high-intensity radiation can be obtained with a relatively simple configuration, but the plasma raw material is scattered and consumed, requiring regular supply and affecting stable continuous operation
Solution Approach 1:
The patent applies preliminary action by pre-storing the plasma raw material on the rotation body in a reservoir structure before irradiation. This allows the material to be readily available at the irradiation position without requiring frequent external supply interruptions, thereby maintaining stable continuous operation while preserving high radiation intensity.
Solution Approach 2:
The patent introduces an intermediary mechanism (the rotation body with reservoir and supply channel) that mediates between the external supply system and the irradiation position. This intermediary structure enables continuous material availability by storing and gradually supplying the plasma raw material, resolving the contradiction between high productivity and operational stability.
2Duration of action of stationary object
If the heater is disposed away from the vicinity of the bearing to protect the bearing with low heat resistance, then the bearing lifetime is extended, but the temperature of the rotation body in the vicinity of the rotation shaft is low, causing the plasma raw material to solidify and causing eccentricity and rotational disturbance
Solution Approach 1:
The patent segments the heating function from the bearing area by introducing a separate heating mechanism that selectively heats only the plasma raw material in the reservoir and supply channel, while keeping the bearing area cool. This segmentation allows the bearing to maintain its lifetime while the plasmaraw material remains in a liquid state for stable rotation.
Solution Approach 2:
The patent applies local quality by creating different thermal conditions in different regions of the rotation body. The plasmaraw material region is heated to maintain liquid state and prevent solidification, while the bearing region is kept cool to protect the bearing. This localized quality control resolves the contradiction between bearing lifetime and rotational stability.
3Object-generated harmful factors
If the debris shield is positioned close to the rotation body to prevent debris generation, then debris is reduced, but it becomes difficult to supply the plasmaraw material to the irradiation position of the laser beam
Solution Approach 1:
The patent extracts the plasmaraw material supply function from the general rotation body structure by introducing a dedicated supply channel that is separate from the debris shield structure. This extraction allows the debris shield to remain close to the rotation body for effective debris containment, while the separate supply channel maintains unobstructed material supply to the irradiation position.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables stable and long-term supply of plasma raw materials to the irradiation position, enhancing the stability of the light source operation and reducing debris, thereby improving the reliability and efficiency of EUV light generation.
Implementation Method 1
a method of supplying a plasma raw material to an irradiation region of a laser beam using the centrifugal force of a rotation body has been developed
Data Source
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AI summary
[Object] To provide a rotation body and a light source apparatus that are capable of stably supplying a plasma raw material an irradiation position of an energy beam for a long period of time. [Solving Means] A rotation body according to an embodiment of the present invention is a rotation body included in a light source apparatus that transforms a liquid plasma raw material into plasma by irradiation of an energy beam to extract radiation, including: a shaft circumference compartment; a raw material accommodating compartment; and an entering prevention portion. The shaft circumference compartment is a compartment around a rotation shaft for causing the rotation body to rotate. The raw material accommodating compartment is spaced apart from the rotation shaft than the shaft circumference compartment and accommodates the plasma raw material, the energy beam entering the raw material accommodating compartment. The entering prevention portion is provided at a boundary between the shaft circumference compartment and the raw material accommodating compartment and prevents the plasma raw material from entering the shaft circumference compartment from the raw material accommodating compartment.