Rotation Cup Exhaust System for Liquid Atmosphere Discharge

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Solution Overview

Problem

Conventional liquid treatment apparatuses are ineffective in guiding and exhausting the processing liquid atmosphere, including liquid droplets and gasified processing liquid, around and above a target object.

Innovation Solution

A liquid treatment apparatus featuring a rotation cup and rotation exhaust cup that are rotatable together, along with a discharge mechanism including inner and outer discharge channels and a slidable dispersion plate to control the flow of processing liquid atmosphere, effectively guiding and discharging the processing liquid atmosphere around and above the target object.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a scatter preventing cup is used to vent gas, then gas venting is improved, but processing liquid atmosphere discharge is insufficient

Engineering Contradiction:
Improvegas ventingVSAvoidprocessing liquid atmosphere discharge
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The exhaust system is divided into two separate paths: one for gas venting through the scatter preventing cup, and another for processing liquid atmosphere discharge through the rotation exhaust cup. This segmentation allows each component to specialize in its function, with the rotation exhaust cup specifically designed to capture and discharge liquid droplets and gasified processing liquid that the scatter preventing cup cannot effectively handle.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The rotation exhaust cup is designed to rotate together with the support part, creating a dynamic exhaust system that can effectively track and capture the processing liquid atmosphere as the target object rotates. This rotational movement ensures continuous contact with the liquid atmosphere regardless of the target object's position, significantly improving discharge effectiveness compared to static exhaust structures.

Inventive Principle:
Principle #15Dynamics

2Device complexity

If processing liquid atmosphere is not effectively discharged, then device complexity is reduced, but particle formation on target object increases

Engineering Contradiction:
Improveexhaust mechanismVSAvoidparticle formation
Core Design Contradiction:
Device complexityVSObject-generated harmful factors

Solution Approach 1:

The rotation exhaust cup acts as an intermediary component between the processing liquid atmosphere and the discharge mechanism. It specifically captures liquid droplets and gasified processing liquid that escape the main exhaust path, directing them to the discharge mechanism. This intermediary function prevents particles from forming on the target object without requiring complete redesign of the entire exhaust system.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Object-generated harmful factors

If rotation cup and rotation exhaust cup are added, then processing liquid atmosphere discharge is improved, but device complexity increases

Engineering Contradiction:
Improveprocessing liquid atmosphere dischargeVSAvoidexhaust mechanism
Core Design Contradiction:
Object-generated harmful factorsVSDevice complexity

Solution Approach 1:

The rotation exhaust cup is merged with the existing rotational support structure, causing it to rotate together with the support part and target object. This integration allows the exhaust mechanism to leverage the existing rotational motion without requiring separate drive systems, reducing the overall complexity increase despite adding functional components.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The rotation exhaust cup serves multiple functions: it acts as both a capture structure for processing liquid atmosphere and as a rotational component that moves with the target object. This multi-functionality reduces the need for additional dedicated components, thereby limiting the increase in device complexity while maintaining effective liquid atmosphere discharge.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus ensures effective discharge of the processing liquid atmosphere, preventing residual chemical solutions from causing particles on the target object and maintaining a balanced flow of processing liquid, thereby enhancing processing efficiency and preventing vortex flows.

Implementation Method 1

a rotation cup that is located outside of the outer circumference of the target object and is rotatable together with the support part, a rotation exhaust cup that is arranged above the rotation cup and is rotatable together with the rotation cup

Methodology Applied
Scientific EffectCentrifugal force: Centrifugal Force

Data Source

PatentUS8201568B2Liquid treatment apparatus
Publication Date: 2012.06.19 TOKYO ELECTRON LTD
  • US8201568B2 patent drawing
  • US8201568B2 patent drawing
  • US8201568B2 patent drawing

AI summary

Disclosed is a liquid treatment apparatus capable of effectively exhausting processing liquid atmosphere around a target object. The liquid treatment apparatus includes a container, a support part located within the container that supports the target object, a rotation driving mechanism to rotate the target object supported by the support part, a processing liquid supply mechanism to supply a processing liquid to the target object, and a rotation cup, which is located outside of the outer circumference of the target object and is rotatable together with the support part. A rotation exhaust cup is arranged above the rotation cup and is rotatable together with the rotation cup. A discharge mechanism discharges processing liquid atmosphere guided by the rotation cup and the rotation exhaust cup.