Rotation Rate Sensor Nonlinear Compensation
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Solution Overview
Problem
Existing rotation rate sensors face challenges in compensating for 2f quadrature forces with non-linear dependence on deflection, which affects signal quality and requires modulation adaptation.
Innovation Solution
Incorporating a compensation element with a non-linear dependence on deflection in the excitation direction, and generating a noisy signal to optimize modulation, specifically using a fixed electrode and recess configuration to excite a compensation oscillation component with twice the frequency of the excitation oscillation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a compensation element with non-linear dependence on deflection is used, then 2f quadrature force compensation is improved, but device complexity increases
Solution Approach 1:
The patent changes the functional parameter of the compensation element from linear to non-linear dependence on deflection. This is achieved by designing the compensation element with a non-linear spring characteristic or by using a non-linear actuator (such as a piezoelectric element with non-linear voltage-deflection relationship). This parameter change enables effective compensation of the non-linear 2f quadrature force while maintaining a relatively simple device structure.
Solution Approach 2:
The patent replaces traditional mechanical compensation mechanisms with an electrostatic or piezoelectric compensation element. The compensation element uses electrical fields or piezoelectric effects to generate compensating forces, substituting complex mechanical linkages with field-based actuation. This reduces mechanical complexity while achieving the required non-linear force compensation.
2Measurement precision
If modulation is increased for A/D converter, then signal quality is improved, but noise generation increases
Solution Approach 1:
The patent converts the harmful quadrature force into a beneficial signal by deliberately generating a noisy signal at a known frequency (the excitation frequency). This noisy signal is intentionally introduced through the compensation element, and then both the noisy signal and the quadrature force are compensated together through signal processing. The harmful quadrature force becomes part of the compensatable signal rather than an unwanted disturbance.
Solution Approach 2:
The patent implements feedback by measuring the actual quadrature force component and using this information to adjust the compensation element's output. The detection system monitors the Coriolis element's motion, identifies the quadrature force component, and feeds this information back to the compensation element to generate an equal and opposite compensating force, thereby eliminating the harmful effect.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for effective compensation of 2f quadrature forces and enhances signal quality by enabling sufficient modulation for A/D converters, resulting in improved rotation rate measurement precision.
Implementation Method 1
the Coriolis element being excitable with the aid of an excitation arrangement to carry out an excitation oscillation along an excitation direction
Implementation Method 2
a compensation force having a non-linear dependence on the deflection in the excitation direction
Implementation Method 3
a detection signal is detected as a function of a force action on the Coriolis element which is to be detected
Data Source
AI summary
A rotation rate sensor includes a substrate having a main extension plane and a Coriolis element, in which the rotation rate sensor is configured so that the Coriolis element is excitable with the aid of an excitation arrangement to carry out an excitation oscillation along a first direction and in parallel to the main extension plane, the rotation rate sensor including a compensation element for exerting a compensation force, the compensation force having a non-linear dependence on the excitation oscillation.