Rotation Rate Sensor with Interlocked Oscillating Masses
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Solution Overview
Problem
Existing rotation rate sensors are complex, sensitive to rotational accelerations, and have high spurious mode density, leading to undesirable operational effects and increased space requirements.
Innovation Solution
A simplified rotation rate sensor design with oscillating masses positioned close to each other, either on top or interlocked, reducing spurious mode density and space requirements by utilizing a shared or overlapping functional layer configuration, and optimizing mass distribution to minimize rotational acceleration sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple rotation rate sensors are coupled to each other to distinguish rotational acceleration from rotation rate, then the ability to distinguish rotational acceleration improves, but the device complexity and spurious mode density increase
Solution Approach 1:
The invention divides a single sensor into multiple oscillating masses (first and second oscillating masses) that operate within one sensor structure. Each mass can be independently actuated and sensed, enabling differentiation of rotational acceleration from rotation rate without requiring multiple separate sensor units, thus reducing overall device complexity while maintaining measurement precision.
Solution Approach 2:
The first and second oscillating masses are positioned close to each other with their centers of mass situated near each other in space. This nested-like arrangement allows both masses to coexist within a compact sensor structure, reducing the space requirement and simplifying the overall device while enabling the differential measurement capability needed to distinguish rotational acceleration.
2Measurement precision
If multiple rotation rate sensors are coupled to each other, then the ability to distinguish rotational acceleration improves, but the space requirement increases
Solution Approach 1:
The invention combines multiple oscillating masses (first and second oscillating masses) into a single integrated sensor structure. By merging the functionality of what would traditionally require separate sensor units into one compact design with interlaced and/or interlocked arrangement, the space requirement is reduced while maintaining the capability to distinguish rotational acceleration through differential measurement of the multiple masses.
Solution Approach 2:
The first and second oscillating masses are positioned close to each other with their centers of mass situated near each other in space. This nested-like arrangement allows both masses to coexist within a compact sensor structure, reducing the space requirement while enabling the differential measurement capability needed to distinguish rotational acceleration.
3Measurement precision
If a filigreed structure is used to couple rotation rate sensors, then the ability to distinguish rotational acceleration improves, but the spurious mode density increases
Solution Approach 1:
The invention segments the oscillating masses into distinct first and second masses that can be independently controlled and measured. This segmentation allows for simpler coupling structures without filigreed designs, reducing spurious mode density while maintaining the ability to distinguish rotational acceleration through differential measurement of the separate masses.
Solution Approach 2:
Instead of using complex filigreed coupling structures to achieve differential measurement, the invention inverts the approach by using simple coupling structures with multiple independently actuated oscillating masses. The differentiation capability arises from having multiple masses that can be driven in different modes, rather than from complex structural coupling, thereby reducing spurious mode density.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design reduces rotational acceleration sensitivity, simplifies the sensor structure, and minimizes space requirements while enhancing the distinguishability of Coriolis acceleration from disturbance accelerations.
Implementation Method 1
When the rotation rate sensor is subjected to a rotation rate about the rotational axis, a seismic mass of the rotation rate sensor which is driven to carry out a drive oscillation along a drive plane is deflected out of the drive plane into a detection direction due to the Coriolis effect.
Implementation Method 2
If the rotation rate sensor is additionally subjected to an interfering, temporally variable rotation rate or a so-called disturbance rotational acceleration, the seismic mass is deflected in the detection direction or driven to carry out a detection mode-like movement due to the mass inertia of the sub-oscillators.
Data Source
AI summary
A rotation rate sensor for detecting a rotation rate about a rotational axis parallel to a main extension plane of a substrate of the sensor includes: a first oscillating mass; and a second oscillating mass mechanically coupled to the first oscillating mass. The first oscillating mass is (i) deflectable along a first oscillations plane parallel to the main extension plane, (ii) extends in a planar manner parallel to the first oscillations plane in a rest position, and (iii) deflectable out of the first oscillations plane into a first deflection position. The second oscillating mass is (i) deflectable along a second oscillations plane parallel to the first oscillations plane, (ii) extends in a planar manner parallel to the second oscillations plane in a rest position, and (iii) deflectable out of the second oscillations plane into a second deflection position.